发明授权
- 专利标题: Low-temperature flip chip die attach
- 专利标题(中): 低温倒装芯片贴片
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申请号: US13477764申请日: 2012-05-22
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公开(公告)号: US08994190B2公开(公告)日: 2015-03-31
- 发明人: Trent S. Uehling
- 申请人: Trent S. Uehling
- 申请人地址: US TX Austin
- 专利权人: Freescale Semiconductor, Inc.
- 当前专利权人: Freescale Semiconductor, Inc.
- 当前专利权人地址: US TX Austin
- 代理商 Jonathan N. Geld; Mary Jo Bertani
- 主分类号: H01L21/56
- IPC分类号: H01L21/56 ; H01L23/498 ; H01L23/00
摘要:
A mechanism for electrically coupling a semiconductor device die to a semiconductor device package substrate that avoids introduction of excessive temperature induced stresses to the semiconductor device die interconnect is provided. In one embodiment, the semiconductor device die is mechanically attached to the package substrate (or another semiconductor device die) at room temperature through the use of a plug-in socket or wedge connection having corresponding mating features formed on the die and substrate. The mechanical interconnect features can be formed on the die and substrate interconnects using an electroplating process. The surfaces of the semiconductor device die and package substrate can then be coupled using an underfill material. A low-temperature solid state bonding process can then be used to diffuse the materials forming the plug and socket features in order to form the electrical connection.
公开/授权文献
- US20130313726A1 LOW-TEMPERATURE FLIP CHIP DIE ATTACH 公开/授权日:2013-11-28
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