- 专利标题： Method and apparatus of tuning a scanning probe microscope
-
申请号： US13674774申请日： 2012-11-12
-
公开(公告)号： US08997259B2公开(公告)日： 2015-03-31
- 发明人: Chanmin Su , Paul Silva , Lin Huang , Bede Pittenger , Shuiqing Hu
- 申请人： Bruker Nano, Inc.
- 申请人地址： US CA Santa Barbara
- 专利权人： Bruker Nano, Inc.
- 当前专利权人： Bruker Nano, Inc.
- 当前专利权人地址： US CA Santa Barbara
- 代理机构： Boyle Fredrickson S.C.
- 主分类号： G01Q30/10
- IPC分类号： G01Q30/10 ; G01Q30/00 ; G01Q30/04 ; B82Y35/00 ; G01Q60/34
摘要：
An apparatus and method of automatically determining an operating frequency of a scanning probe microscope such as an atomic force microscope (AFM) is shown. The operating frequency is not selected based on a peak of the amplitude response of the probe when swept over a range of frequencies; rather, the operating frequency is selected using only peak data corresponding to a TIDPS curve.
公开/授权文献
信息查询
