-
公开(公告)号：US20150204902A1
公开(公告)日：2015-07-23
申请号：US14675140
申请日：2015-03-31
申请人： Bruker Nano, Inc.
发明人： Chanmin Su , Paul Silva , Lin Huang , Bede Pittenger , Shuiqing Hu
摘要： An apparatus and method of automatically determining an operating frequency of a scanning probe microscope such as an atomic force microscope (AFM) is shown. The operating frequency is not selected based on a peak of the amplitude response of the probe when swept over a range of frequencies; rather, the operating frequency is selected using only peak data corresponding to a TIDPS curve.
摘要翻译： 示出了自动确定诸如原子力显微镜（AFM）的扫描探针显微镜的操作频率的装置和方法。 基于在扫描频率范围时探头的振幅响应的峰值，不选择工作频率; 而是仅使用对应于TIDPS曲线的峰值数据来选择工作频率。
-
2.发明申请Method and Apparatus of Electrical Property Measurement Using an AFM Operating in Peak Force Tapping Mode 有权使用在峰值力攻丝模式下运行的AFM进行电气性能测量的方法和装置公开(公告)号：US20130276174A1
公开(公告)日：2013-10-17
申请号：US13925385
申请日：2013-06-24
申请人： Bruker Nano, Inc.
发明人： Chunzeng Li , Yan Hu , Ji Ma , Jianli He , Lin Huang , Stephen C. Minne , Henry Mittel , Weijie Wang , Shuiqing Hu , Chanmin Su
CPC分类号： G01Q20/00 , B82Y35/00 , G01Q10/065 , G01Q20/02 , G01Q60/24 , G01Q60/30 , G01Q60/32 , G01Q60/34
摘要： An apparatus and method of collecting topography, mechanical property data and electrical property data with an atomic force microscope (AFM) in either a single pass or a dual pass operation. PFT mode is preferably employed thus allowing the use of a wide range of probes, one benefit of which is to enhance the sensitivity of electrical property measurement.
摘要翻译： 一种利用原子力显微镜（AFM）在单程或双程操作中收集地形，力学性能数据和电性能数据的装置和方法。 优选使用PFT模式，因此允许使用宽范围的探针，其一个优点是增强电性能测量的灵敏度。
-
公开(公告)号：US20160178659A1
公开(公告)日：2016-06-23
申请号：US14970237
申请日：2015-12-15
申请人： Bruker Nano, Inc.
发明人： Chunzeng Li , Yan Hu , Ji Ma , Jianli He , Lin Huang , Stephen C. Minne , Henry Mittel , Weijie Wang , Shuiqing Hu , Chanmin Su
IPC分类号： G01Q60/34
CPC分类号： G01Q20/00 , B82Y35/00 , G01Q10/065 , G01Q20/02 , G01Q60/24 , G01Q60/30 , G01Q60/32 , G01Q60/34
摘要： An apparatus and method of collecting topography, mechanical property data and electrical property data with an atomic force microscope (AFM) in either a single pass or a dual pass operation. PFT mode is preferably employed thus allowing the use of a wide range of probes, one benefit of which is to enhance the sensitivity of electrical property measurement.
-
公开(公告)号：US09116167B2
公开(公告)日：2015-08-25
申请号：US14675140
申请日：2015-03-31
申请人： Bruker Nano, Inc.
发明人： Chanmin Su , Paul Silva , Lin Huang , Bede Pittenger , Shuiqing Hu
摘要： An apparatus and method of automatically determining an operating frequency of a scanning probe microscope such as an atomic force microscope (AFM) is shown. The operating frequency is not selected based on a peak of the amplitude response of the probe when swept over a range of frequencies; rather, the operating frequency is selected using only peak data corresponding to a TIDPS curve.
摘要翻译： 示出了自动确定诸如原子力显微镜（AFM）的扫描探针显微镜的操作频率的装置和方法。 基于在扫描频率范围时探头的振幅响应的峰值，不选择工作频率; 而是仅使用对应于TIDPS曲线的峰值数据来选择工作频率。
-
公开(公告)号：US09869694B2
公开(公告)日：2018-01-16
申请号：US14970237
申请日：2015-12-15
申请人： Bruker Nano, Inc.
发明人： Chunzeng Li , Yan Hu , Ji Ma , Jianli He , Lin Huang , Stephen C. Minne , Henry Mittel , Weijie Wang , Shuiqing Hu , Chanmin Su
IPC分类号： G01Q60/24 , G01Q20/00 , B82Y35/00 , G01Q10/06 , G01Q60/32 , G01Q20/02 , G01Q60/30 , G01Q60/34
CPC分类号： G01Q20/00 , B82Y35/00 , G01Q10/065 , G01Q20/02 , G01Q60/24 , G01Q60/30 , G01Q60/32 , G01Q60/34
摘要： An apparatus and method of collecting topography, mechanical property data and electrical property data with an atomic force microscope (AFM) in either a single pass or a dual pass operation. PFT mode is preferably employed thus allowing the use of a wide range of probes, one benefit of which is to enhance the sensitivity of electrical property measurement.
-
公开(公告)号：US20160109477A1
公开(公告)日：2016-04-21
申请号：US14834061
申请日：2015-08-24
申请人： Bruker Nano, Inc.
发明人： Chanmin Su , Paul Silva , Lin Huang , Bede Pittenger , Shuiqing Hu
摘要： An apparatus and method of automatically determining an operating frequency of a scanning probe microscope such as an atomic force microscope (AFM) is shown. The operating frequency is not selected based on a peak of the amplitude response of the probe when swept over a range of frequencies; rather, the operating frequency is selected using only peak data corresponding to a TIDPS curve.
摘要翻译： 示出了自动确定诸如原子力显微镜（AFM）的扫描探针显微镜的操作频率的装置和方法。 基于在扫描频率范围时探头的振幅响应的峰值，不选择工作频率; 而是仅使用对应于TIDPS曲线的峰值数据来选择工作频率。
-
7.发明授权Method and apparatus of electrical property measurement using an AFM operating in peak force tapping mode 有权使用在峰值力攻丝模式下工作的AFM进行电气性能测量的方法和装置公开(公告)号：US09213047B2
公开(公告)日：2015-12-15
申请号：US13925385
申请日：2013-06-24
申请人： Bruker Nano, Inc.
发明人： Chunzeng Li , Yan Hu , Ji Ma , Jianli He , Lin Huang , Stephen C. Minne , Henry Mittel , Weijie Wang , Shuiqing Hu , Chanmin Su
IPC分类号： G01Q60/24 , G01Q20/00 , B82Y35/00 , G01Q10/06 , G01Q60/32 , G01Q20/02 , G01Q60/30 , G01Q60/34
CPC分类号： G01Q20/00 , B82Y35/00 , G01Q10/065 , G01Q20/02 , G01Q60/24 , G01Q60/30 , G01Q60/32 , G01Q60/34
摘要： An apparatus and method of collecting topography, mechanical property data and electrical property data with an atomic force microscope (AFM) in either a single pass or a dual pass operation. PFT mode is preferably employed thus allowing the use of a wide range of probes, one benefit of which is to enhance the sensitivity of electrical property measurement.
摘要翻译： 一种利用原子力显微镜（AFM）在单程或双程操作中收集地形，力学性能数据和电性能数据的装置和方法。 优选使用PFT模式，因此允许使用宽范围的探针，其一个优点是增强电性能测量的灵敏度。
-
公开(公告)号：US08997259B2
公开(公告)日：2015-03-31
申请号：US13674774
申请日：2012-11-12
申请人： Bruker Nano, Inc.
发明人： Chanmin Su , Paul Silva , Lin Huang , Bede Pittenger , Shuiqing Hu
摘要： An apparatus and method of automatically determining an operating frequency of a scanning probe microscope such as an atomic force microscope (AFM) is shown. The operating frequency is not selected based on a peak of the amplitude response of the probe when swept over a range of frequencies; rather, the operating frequency is selected using only peak data corresponding to a TIDPS curve.
-
公开(公告)号：US20130125269A1
公开(公告)日：2013-05-16
申请号：US13674774
申请日：2012-11-12
申请人： Bruker Nano, Inc.
发明人： Chanmin Su , Paul Silva , Lin Huang , Bede Pittenger , Shuiqing Hu
IPC分类号： G01Q30/00
摘要： An apparatus and method of automatically determining an operating frequency of a scanning probe microscope such as an atomic force microscope (AFM) is shown. The operating frequency is not selected based on a peak of the amplitude response of the probe when swept over a range of frequencies; rather, the operating frequency is selected using only peak data corresponding to a TIDPS curve.
摘要翻译： 示出了自动确定诸如原子力显微镜（AFM）的扫描探针显微镜的操作频率的装置和方法。 基于在扫描频率范围时探头的振幅响应的峰值，不选择工作频率; 而是仅使用对应于TIDPS曲线的峰值数据来选择工作频率。
-
-
-
-
-
-
-
-
搜索结果
9 条记录 (耗时 0.02 秒)
