发明授权
- 专利标题: Metal oxide semiconductor structure and production method thereof
- 专利标题(中): 金属氧化物半导体结构及其制造方法
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申请号: US13101983申请日: 2011-05-05
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公开(公告)号: US09006730B2公开(公告)日: 2015-04-14
- 发明人: Chin-Wen Lin , Chuan-I Huang , Chung-Chin Huang , Ted Hong Shinn
- 申请人: Chin-Wen Lin , Chuan-I Huang , Chung-Chin Huang , Ted Hong Shinn
- 申请人地址: TW Hsinchu
- 专利权人: E Ink Holdings Inc.
- 当前专利权人: E Ink Holdings Inc.
- 当前专利权人地址: TW Hsinchu
- 代理机构: Guice Patents PLLC
- 优先权: TW100101206A 20110113
- 主分类号: H01L29/12
- IPC分类号: H01L29/12 ; H01L29/786
摘要:
A metal oxide semiconductor structure and a production method thereof, the structure including: a substrate; a gate electrode, deposited on the substrate; a gate insulation layer, deposited over the gate electrode and the substrate; an IGZO layer, deposited on the gate insulation layer and functioning as a channel; a source electrode, deposited on the gate insulation layer and being at one side of the IGZO layer; a drain electrode, deposited on the gate insulation layer and being at another side of the IGZO layer; a first passivation layer, deposited over the source electrode, the IGZO layer, and the drain electrode; a second passivation layer, deposited over the first passivation layer; and an opaque resin layer, deposited over the source electrode, the second passivation layer, and the drain electrode.
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