An embodiment of the invention provides a chip package which includes: a semiconductor substrate having a first surface and a second surface; a device region formed in the semiconductor substrate; a dielectric layer disposed on the first surface of the semiconductor substrate; a conducting pad structure located in the dielectric layer and electrically connected to the device region, wherein the conducting pad structure comprises a stacked structure of a plurality of conducting pad layers; a support layer disposed on a top surface of the conducting pad structure; and a protection layer disposed on the second surface of the semiconductor substrate.