Invention Grant
- Patent Title: Exposure apparatus including light blocking member with light condensing part
- Patent Title (中): 曝光装置包括具有聚光部分的遮光部件
-
Application No.: US13565073Application Date: 2012-08-02
-
Publication No.: US09007564B2Publication Date: 2015-04-14
- Inventor: Chang-Hoon Kim , Kab-Jong Seo , Hi-Kuk Lee , Tsunemitsu Torigoe
- Applicant: Chang-Hoon Kim , Kab-Jong Seo , Hi-Kuk Lee , Tsunemitsu Torigoe
- Applicant Address: KR
- Assignee: Samsung Display Co., Ltd.
- Current Assignee: Samsung Display Co., Ltd.
- Current Assignee Address: KR
- Agency: Cantor Colburn LLP
- Priority: KR10-2011-0142628 20111226
- Main IPC: G03B27/54
- IPC: G03B27/54 ; G03B27/32 ; G03F7/20
Abstract:
An exposure apparatus includes an irradiating part which irradiates light, a light blocking member including a light condensing part at a side of the light blocking member, where the light condensing part condenses the light, a mask which is spaced apart from the light blocking member by a first distance, and a transporting part which transports a target substrate in a first direction.
Public/Granted literature
- US20130162965A1 EXPOSURE APPARATUS Public/Granted day:2013-06-27
Information query
