Invention Grant
US09012986B2 Combination FinFET and planar FET semiconductor device and methods of making such a device
有权
组合FinFET和平面FET半导体器件及其制造方法
- Patent Title: Combination FinFET and planar FET semiconductor device and methods of making such a device
- Patent Title (中): 组合FinFET和平面FET半导体器件及其制造方法
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Application No.: US14283881Application Date: 2014-05-21
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Publication No.: US09012986B2Publication Date: 2015-04-21
- Inventor: Min-hwa Chi , Werner Juengling
- Applicant: GLOBALFOUNDRIES Inc.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee Address: KY Grand Cayman
- Agency: Amerson Law Firm, PLLC
- Main IPC: H01L29/78
- IPC: H01L29/78 ; H01L21/84 ; H01L27/12

Abstract:
A device includes a plurality of trenches and fins defined in a substantially un-doped layer of semiconducting material, a gate insulation layer positioned on the fins and on the bottom of the trenches, a gate electrode and a device isolation structure. One method disclosed herein involves identifying a top width of each of a plurality of fins and a depth of a plurality of trenches to be formed in a substantially un-doped layer of semiconducting material, wherein, during operation, the device is adapted to operate in at least three distinguishable conditions depending upon a voltage applied to the device, performing at least one process operation to define the trenches and fins in the layer of semiconducting material, forming a gate insulation layer on the fins and on a bottom of the trenches and forming a gate electrode above the gate insulation layer.
Public/Granted literature
- US20140252480A1 COMBINATION FINFET AND PLANAR FET SEMICONDUCTOR DEVICE AND METHODS OF MAKING SUCH A DEVICE Public/Granted day:2014-09-11
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