发明授权
- 专利标题： Collector mirror assembly and method for producing extreme ultraviolet radiation
- 专利标题（中）： 收集器镜组件和产生极紫外辐射的方法
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申请号： US13641069申请日： 2011-03-18
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公开(公告)号： US09013679B2公开(公告)日： 2015-04-21
- 发明人: Dzmitry Labetski , Erik Roelof Loopstra , Antonius Theodorus Wilhelmus Kempen
- 申请人： Dzmitry Labetski , Erik Roelof Loopstra , Antonius Theodorus Wilhelmus Kempen
- 申请人地址： NL Veldhoven
- 专利权人： ASML Netherlands B.V.
- 当前专利权人： ASML Netherlands B.V.
- 当前专利权人地址： NL Veldhoven
- 代理机构： Pillsbury Winthrop Shaw Pittman LLP
- 国际申请： PCT/EP2011/054098 WO 20110318
- 国际公布： WO2011/131431 WO 20111027
- 主分类号： G02B5/08
- IPC分类号： G02B5/08 ; G03F7/20 ; G21K5/04
摘要：
A collector mirror assembly includes a collector mirror that includes a reflective surface and a hole having an edge. The hole extends through the reflective surface. The assembly also includes a tubular body having an inner surface and an outer surface. The tubular body is constructed and arranged to guide a gas flow in a direction substantially transverse to the reflective surface. The outer surface of the tubular body and the edge of the hole form an opening arranged to guide a further gas flow that diverges with respect the gas flow substantially transverse to the reflective surface.
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