Invention Grant
- Patent Title: Liquid control device and mesh-like body assembly applied thereto
- Patent Title (中): 液体控制装置和网状体组件应用于其上
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Application No.: US13940102Application Date: 2013-07-11
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Publication No.: US09022366B2Publication Date: 2015-05-05
- Inventor: Masayuki Kouketsu , Hiroshi Itafuji , Masayo Okada
- Applicant: CKD Corporation
- Applicant Address: JP Komaki-shi, Aichi
- Assignee: CKD Corporation
- Current Assignee: CKD Corporation
- Current Assignee Address: JP Komaki-shi, Aichi
- Agency: Beyer Law Group LLP
- Priority: JP2012-156094 20120712
- Main IPC: B01F3/04
- IPC: B01F3/04 ; B05B9/03 ; B01D1/22

Abstract:
A liquid vaporizer includes a first housing having a liquid-supplied surface to which a chemical solution is supplied, a heater, a mesh, a first holder and a second holder attached to the outer edge portions of the mesh, the outer edge portions opposing each other in a direction of spreading of the mesh, first cover bolts, stems supported by the first housing so as to be movable along a specific direction inclined with respect to the liquid-supplied surface, second cover bolts, coil springs biasing the stems along the specific direction and bring the mesh into intimate contact with the liquid-supplied surface, and a lid member covering the mesh from a side of the liquid-supplied surface to seal a space around the liquid-supplied surface with the first housing.
Public/Granted literature
- US20140015151A1 LIQUID CONTROL DEVICE AND MESH-LIKE BODY ASSEMBLY APPLIED THERETO Public/Granted day:2014-01-16
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