发明授权
US09024311B2 Thin film transistor, method for manufacturing same, active matrix substrate, display panel and display device
有权
薄膜晶体管,制造方法,有源矩阵基板,显示面板和显示装置
- 专利标题: Thin film transistor, method for manufacturing same, active matrix substrate, display panel and display device
- 专利标题(中): 薄膜晶体管,制造方法,有源矩阵基板,显示面板和显示装置
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申请号: US13379670申请日: 2010-04-06
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公开(公告)号: US09024311B2公开(公告)日: 2015-05-05
- 发明人: Takeshi Hara , Hirohiko Nishiki , Yoshimasa Chikama , Kazuo Nakagawa , Yoshifumi Ohta , Tetsuya Aita , Masahiko Suzuki , Okifumi Nakagawa , Yoshiyuki Miyajima , Yuuji Mizuno , Michiko Takei , Yoshiyuki Harumoto
- 申请人: Takeshi Hara , Hirohiko Nishiki , Yoshimasa Chikama , Kazuo Nakagawa , Yoshifumi Ohta , Tetsuya Aita , Masahiko Suzuki , Okifumi Nakagawa , Yoshiyuki Miyajima , Michiko Takei , Yoshiyuki Harumoto , Hinae Mizuno
- 申请人地址: JP Osaka
- 专利权人: Sharp Kabushiki Kaisha
- 当前专利权人: Sharp Kabushiki Kaisha
- 当前专利权人地址: JP Osaka
- 代理机构: Keating & Bennett, LLP
- 优先权: JP2009-149470 20090624; JP2009-235737 20091009
- 国际申请: PCT/JP2010/002520 WO 20100406
- 国际公布: WO2010/150446 WO 20101229
- 主分类号: H01L29/786
- IPC分类号: H01L29/786 ; H01L21/336 ; H01L27/12
摘要:
The present invention provides a thin film transistor including an oxide semiconductor layer (4) for electrically connecting a signal electrode (6a) and a drain electrode (7a), the an oxide semiconductor layer being made from an oxide semiconductor; and a barrier layer (6b) made from at least one selected from the group consisting of Ti, Mo, W, Nb, Ta, Cr, nitrides thereof, and alloys thereof, the barrier layer (6b) being in touch with the signal electrode (6a) and the oxide semiconductor layer (4) and separating the signal electrode (6a) from the oxide semiconductor layer (4). Because of this configuration, the thin film transistor can form and maintain an ohmic contact between the first electrode and the channel layer, thereby being a thin film transistor with good properties.
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