发明授权
- 专利标题： Heating apparatus, coating apparatus and heating method
- 专利标题（中）： 加热装置，涂布装置和加热方法
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申请号： US13484625申请日： 2012-05-31
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公开(公告)号： US09027504B2公开(公告)日： 2015-05-12
- 发明人: Hidenori Miyamoto , Tsutomu Sahoda
- 申请人： Hidenori Miyamoto , Tsutomu Sahoda
- 申请人地址： JP Kawasaki-shi
- 专利权人： Tokyo Ohka Kogyo Co., Ltd.
- 当前专利权人： Tokyo Ohka Kogyo Co., Ltd.
- 当前专利权人地址： JP Kawasaki-shi
- 代理机构： Knobbe Martens Olson & Bear LLP
- 主分类号： B05C13/02
- IPC分类号： B05C13/02 ; F24J3/00 ; F27B5/16 ; H01L21/67 ; H01L21/677 ; H01L31/032
摘要：
A heating apparatus including: a first heating part and a second heating part between which a substrate having a coating film is disposed at a substrate position in the film thickness direction; and a distance control part which controls at least one of a first distance between the substrate position and the first heating part and a second distance between the substrate position and the second heating part.
公开/授权文献
- US20120304921A1 HEATING APPARATUS, COATING APPARATUS AND HEATING METHOD 公开/授权日：2012-12-06
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