Invention Grant
US09028022B2 Liquid ejection apparatus, nanoimprint system, and liquid ejection method 有权
液体喷射装置,纳米压印系统和液体喷射方法

Liquid ejection apparatus, nanoimprint system, and liquid ejection method
Abstract:
According an aspect of the present invention, when causing the liquid ejection head to perform a feeding operation along a first direction, the substrate is retracted outside the projected feeding region of the liquid ejection head and the supporting member thereof prior to starting the feeding operation of the liquid ejection head, preventing dusts and other foreign matters, generated as a result of the feeding operation of the liquid ejection head and the supporting member, from being deposited on a surface of the substrate onto which the liquid is to be deposited.
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