发明授权
- 专利标题: Shear mode physical deformation of piezoelectric mechanism
- 专利标题(中): 压电机构的剪切模式物理变形
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申请号: US14000619申请日: 2011-04-05
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公开(公告)号: US09028051B2公开(公告)日: 2015-05-12
- 发明人: Tony S. Cruz-Uribe , Peter Mardilovich
- 申请人: Tony S. Cruz-Uribe , Peter Mardilovich
- 申请人地址: US TX Houston
- 专利权人: Hewlett-Packard Development Company, L.P.
- 当前专利权人: Hewlett-Packard Development Company, L.P.
- 当前专利权人地址: US TX Houston
- 代理商 Michael A. Dryja
- 国际申请: PCT/US2011/031276 WO 20110405
- 国际公布: WO2012/138328 WO 20121011
- 主分类号: B41J2/045
- IPC分类号: B41J2/045 ; B41J2/14 ; B41J2/16 ; H01L41/09 ; H01L41/29 ; H01L41/047 ; H01L41/31 ; H01L41/257
摘要:
A piezoelectric mechanism includes first and second electrodes and a thin film sheet of piezoelectric material. The second electrode is interdigitated in relation to the first electrode. The first and the second electrodes are embedded within the thin film sheet. The thin film sheet is polarized in a direction at least substantially perpendicular to a surface of the thin film sheet. The thin film sheet is to physically deform in a shear mode due to polarization of the thin film sheet at least substantially perpendicular to the surface of the thin film sheet, responsive to an electric field induced within the thin film sheet at least substantially parallel to the sheet via application of a voltage across the first and the second electrodes.
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