发明授权
US09029069B2 Resist underlayer film-forming composition and method for forming pattern
有权
抗蚀剂下层成膜组合物和形成图案的方法
- 专利标题: Resist underlayer film-forming composition and method for forming pattern
- 专利标题(中): 抗蚀剂下层成膜组合物和形成图案的方法
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申请号: US13434781申请日: 2012-03-29
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公开(公告)号: US09029069B2公开(公告)日: 2015-05-12
- 发明人: Shin-ya Minegishi , Yushi Matsumura , Shinya Nakafuji , Kazuhiko Komura , Takanori Nakano , Satoru Murakami , Kyoyu Yasuda , Makoto Sugiura
- 申请人: Shin-ya Minegishi , Yushi Matsumura , Shinya Nakafuji , Kazuhiko Komura , Takanori Nakano , Satoru Murakami , Kyoyu Yasuda , Makoto Sugiura
- 申请人地址: JP Tokyo
- 专利权人: JSR Corporation
- 当前专利权人: JSR Corporation
- 当前专利权人地址: JP Tokyo
- 代理机构: Oblon, McClelland, Maier & Neustadt, L.L.P.
- 优先权: JP2011-081332 20110331
- 主分类号: G03F7/025
- IPC分类号: G03F7/025 ; G03F7/09
摘要:
A resist underlayer film-forming composition includes a polymer including a structural unit shown by a formula (1), and having a polystyrene-reduced weight average molecular weight of from 3000 to 10000, and a solvent. Each of R3 to R8 independently represents a group shown by a formula (2), a hydrogen atom, a hydroxyl group, an alkyl group having 1 to 6 carbon atoms, an alkoxy group having 1 to 6 carbon atoms, an alkoxycarbonyl group having 2 to 10 carbon atoms, an aryl group having 6 to 14 carbon atoms, or a glycidyl ether group having 3 to 6 carbon atoms, wherein at least one of R3 to R8 represents the group shown by the formula (2).
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