发明授权
- 专利标题： Device for holding disk-shaped articles and method thereof
- 专利标题（中）： 用于保持盘形制品的装置及其方法
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申请号： US13701939申请日： 2012-06-13
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公开(公告)号： US09038262B2公开(公告)日： 2015-05-26
- 发明人: Yi Wu , Hao Wang , Wei Li , Ruiting Wang , Bao Zhang
- 申请人： Yi Wu , Hao Wang , Wei Li , Ruiting Wang , Bao Zhang
- 申请人地址： CN Beijing
- 专利权人： BEIJING SEVENSTAR ELECTRONICS CO., LTD.
- 当前专利权人： BEIJING SEVENSTAR ELECTRONICS CO., LTD.
- 当前专利权人地址： CN Beijing
- 代理机构： Anova Law Group, PLLC
- 国际申请： PCT/CN2012/076831 WO 20120613
- 国际公布： WO2013/123742 WO 20130829
- 主分类号： H01L21/687
- IPC分类号： H01L21/687 ; B23Q7/00 ; B23B31/103 ; B23B31/24
摘要：
A device for holding disk-shaped articles and a method thereof are provided. The device comprises a rotatable chuck body and at least two groups of clamping elements arranged at the edge of the chuck body. Each of the clamping elements is mounted to a pivot with the chuck body respectively by means of the rotation of the clamping element with respect to the chuck body. A radial compression spring is connected between the bottom of the clamping element and the chuck body to provide a clamping force for the clamping element. The clamping elements in the same group are provided with magnets with the same polarity, while the clamping elements in different groups are provided with magnets with the opposite polarity. Two sets of electromagnets are arranged on the chuck body and spaced apart evenly.
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