公开(公告)号：US20130219693A1

公开(公告)日：2013-08-29

申请号：US13701939

申请日：2012-06-13

Applicant: Yi Wu ,  Hao Wang ,  Wei Li ,  Ruiting Wang ,  Bao Zhang

Inventor： Yi Wu ,  Hao Wang ,  Wei Li ,  Ruiting Wang ,  Bao Zhang

IPC: H01L21/687 ,  B23B31/24 ,  B23B31/103

CPC classification number: H01L21/68728 ,  B23B31/103 ,  B23B31/24 ,  Y10T29/49998 ,  Y10T279/12 ,  Y10T279/18

Abstract: The present invention discloses a device for holding disk-shaped articles and a method thereof. The device comprises a rotatable chuck body and at least two groups of clamping elements arranged at the edge of the chuck body. Each of the clamping elements is mounted to a pivot with the chuck body respectively by means of the rotation of the clamping element with respect to the chuck body. A radial compression spring is connected between the bottom of the clamping element and the chuck body to provide a clamping force for the clamping element. The clamping elements in the same group are provided with magnets with the same polarity, while the clamping elements in different groups are provided with magnets with the opposite polarity. Two sets of electromagnets are arranged on the chuck body and spaced apart evenly.

Abstract translation: 本发明公开了一种保持盘状物品的装置及其方法。 该装置包括可旋转卡盘主体和布置在卡盘主体的边缘处的至少两组夹紧元件。 每个夹紧元件通过夹紧元件相对于卡盘主体的旋转分别安装到具有卡盘主体的枢轴上。 径向压缩弹簧连接在夹紧元件的底部和卡盘体之间，以为夹紧元件提供夹紧力。 同一组中的夹紧元件设置有具有相同极性的磁体，而不同组中的夹紧元件设置有相反极性的磁体。 两组电磁铁布置在卡盘主体上并均匀间隔开。

公开(公告)号：US08834582B2

公开(公告)日：2014-09-16

申请号：US13701880

申请日：2012-06-13

Applicant: Hongyu Zhao ,  Xiaohong Zhang ,  Likun Pei ,  Bao Zhang ,  Ruiting Wang

Inventor： Hongyu Zhao ,  Xiaohong Zhang ,  Likun Pei ,  Bao Zhang ,  Ruiting Wang

IPC: H01L29/00 ,  H01L21/67 ,  H01L21/677

CPC classification number: H01L21/67769 ,  H01L21/67017 ,  H01L21/67742 ,  H01L21/67766 ,  Y10T29/41

Abstract: The present invention provides an apparatus for manufacturing semiconductor wafer comprising at least two manipulators, at least one set of chemical gas/liquid distribution unit and an air circulating and filtering unit. The air circulating and filtering unit is separated into three regions, including the front region, the middle region, and the side region, which are controlled by respective control electric motors to achieve uniform air flow and uniform pressure in the respective regions. The cleaning degree in the internal of the apparatus can be improved by the regional control of the air circulating and filtering unit; the wafer transport efficiency can be enhanced by the double-armed manipulators having multiple degrees of freedom; and the product yield per unit area can be increased by the chemical gas/liquid distribution unit providing stable and uniform gas/liquid flow and pressure.

Abstract translation: 本发明提供了一种用于制造半导体晶片的装置，其包括至少两个操纵器，至少一组化学气体/液体分配单元和空气循环和过滤单元。 空气循环和过滤单元被分为包括前区域，中间区域和侧区域的三个区域，这三个区域由相应的控制电动机控制，以在各个区域中实现均匀的气流和均匀的压力。 通过空气循环和过滤单元的区域控制可以改善设备内部的清洁度; 可以通过具有多个自由度的双臂操纵器来提高晶片输送效率; 可以通过化学气体/液体分配单元提高单位面积的产品产量，提供稳定和均匀的气/液流量和压力。

公开(公告)号：US09038262B2

公开(公告)日：2015-05-26

申请号：US13701939

申请日：2012-06-13

Applicant: Yi Wu ,  Hao Wang ,  Wei Li ,  Ruiting Wang ,  Bao Zhang

Inventor： Yi Wu ,  Hao Wang ,  Wei Li ,  Ruiting Wang ,  Bao Zhang

IPC: H01L21/687 ,  B23Q7/00 ,  B23B31/103 ,  B23B31/24

CPC classification number: H01L21/68728 ,  B23B31/103 ,  B23B31/24 ,  Y10T29/49998 ,  Y10T279/12 ,  Y10T279/18

Abstract: A device for holding disk-shaped articles and a method thereof are provided. The device comprises a rotatable chuck body and at least two groups of clamping elements arranged at the edge of the chuck body. Each of the clamping elements is mounted to a pivot with the chuck body respectively by means of the rotation of the clamping element with respect to the chuck body. A radial compression spring is connected between the bottom of the clamping element and the chuck body to provide a clamping force for the clamping element. The clamping elements in the same group are provided with magnets with the same polarity, while the clamping elements in different groups are provided with magnets with the opposite polarity. Two sets of electromagnets are arranged on the chuck body and spaced apart evenly.

Abstract translation: 提供了一种用于保持盘状物品的装置及其方法。 该装置包括可旋转卡盘主体和布置在卡盘主体的边缘处的至少两组夹紧元件。 每个夹紧元件通过夹紧元件相对于卡盘主体的旋转分别安装到具有卡盘主体的枢轴上。 径向压缩弹簧连接在夹紧元件的底部和卡盘体之间，以为夹紧元件提供夹紧力。 同一组中的夹紧元件设置有具有相同极性的磁体，而不同组中的夹紧元件设置有相反极性的磁体。 两组电磁铁布置在卡盘主体上并均匀间隔开。

公开(公告)号：US20130160261A1

公开(公告)日：2013-06-27

申请号：US13701880

申请日：2012-06-13

Applicant: Hongyu Zhao ,  Xiaohong Zhang ,  Likun Pei ,  Bao Zhang ,  Ruiting Wang

Inventor： Hongyu Zhao ,  Xiaohong Zhang ,  Likun Pei ,  Bao Zhang ,  Ruiting Wang

IPC: H01L21/677

CPC classification number: H01L21/67769 ,  H01L21/67017 ,  H01L21/67742 ,  H01L21/67766 ,  Y10T29/41

Abstract: The present invention provides an apparatus for manufacturing semiconductor wafer comprising at least two manipulators, at least one set of chemical gas/liquid distribution unit and an air circulating and filtering unit. The air circulating and filtering unit is separated into three regions, including the front region, the middle region, and the side region, which are controlled by respective control electric motors to achieve uniform air flow and uniform pressure in the respective regions. The cleaning degree in the internal of the apparatus can be improved by the regional control of the air circulating and filtering unit; the wafer transport efficiency can be enhanced by the double-armed manipulators having multiple degrees of freedom; and the product yield per unit area can be increased by the chemical gas/liquid distribution unit providing stable and uniform gas/liquid flow and pressure.

Abstract translation: 本发明提供了一种用于制造半导体晶片的装置，其包括至少两个操纵器，至少一组化学气体/液体分配单元和空气循环和过滤单元。 空气循环和过滤单元被分为包括前区域，中间区域和侧区域的三个区域，这三个区域由相应的控制电动机控制，以在各个区域中实现均匀的气流和均匀的压力。 通过空气循环和过滤单元的区域控制可以改善设备内部的清洁度; 可以通过具有多个自由度的双臂操纵器来提高晶片输送效率; 可以通过化学气体/液体分配单元提高单位面积的产品产量，提供稳定和均匀的气/液流量和压力。