发明授权
US09039836B2 Device for the synthesis of nanoparticles by fluidized-bed chemical vapor deposition
有权
用于通过流化床化学气相沉积合成纳米颗粒的装置
- 专利标题: Device for the synthesis of nanoparticles by fluidized-bed chemical vapor deposition
- 专利标题(中): 用于通过流化床化学气相沉积合成纳米颗粒的装置
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申请号: US13123171申请日: 2009-09-10
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公开(公告)号: US09039836B2公开(公告)日: 2015-05-26
- 发明人: Sébastien Donet , Lionel Filhol , Stéphanie Thollon
- 申请人: Sébastien Donet , Lionel Filhol , Stéphanie Thollon
- 申请人地址: FR Paris
- 专利权人: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
- 当前专利权人: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
- 当前专利权人地址: FR Paris
- 代理机构: Oblon, McClelland, Maier & Neustadt, L.L.P.
- 优先权: FR0805584 20081009
- 国际申请: PCT/FR2009/001084 WO 20090910
- 国际公布: WO2010/040908 WO 20100415
- 主分类号: C23C16/00
- IPC分类号: C23C16/00 ; C23C16/442 ; C23C16/44 ; B01J23/42 ; B01J35/00 ; B01J37/02 ; C01B3/00 ; C23C16/455
摘要:
A device for vapor deposition of chemical species on support grains of spherical or similar shape disposed in a fluidized bed. The device includes a first chamber including a fluidized bed in which a funnel-shaped fluidizer element is housed to receive support grains of spherical or similar shape; a second chamber in fluid flow connection with the first chamber to deliver precursors in a vapor phase of chemical species to be deposited on the support grains and to convey a fluidizing gas towards the first chamber; and a flute at an inlet to the fluidizer element to control distribution of the vapor phase precursors and the fluidizing gas within the fluidizer element. The distributor flute includes one or more outer grooves, each groove including a first portion oriented along the longitudinal axis of the flute and a second portion winding helically around the axis to generate a fluidizing gas vortex within the first chamber.
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