Invention Grant
- Patent Title: Methods of producing free-standing semiconductors using sacrificial buffer layers and recyclable substrates
- Patent Title (中): 使用牺牲缓冲层和可回收底物生产独立式半导体的方法
-
Application No.: US13990756Application Date: 2010-12-01
-
Publication No.: US09041027B2Publication Date: 2015-05-26
- Inventor: Aaron Joseph Ptak , Yong Lin , Andrew Norman , Kirstin Alberi
- Applicant: Aaron Joseph Ptak , Yong Lin , Andrew Norman , Kirstin Alberi
- Applicant Address: US CO Golden
- Assignee: Alliance for Sustainable Energy, LLC
- Current Assignee: Alliance for Sustainable Energy, LLC
- Current Assignee Address: US CO Golden
- Agent John C. Stolpa; Michael A. McIntyre
- International Application: PCT/US2010/058514 WO 20101201
- International Announcement: WO2012/074523 WO 20120607
- Main IPC: H01L33/26
- IPC: H01L33/26 ; H01L21/02 ; C30B23/02 ; C30B25/18 ; C30B29/40 ; H01L29/04

Abstract:
A method of producing semiconductor materials and devices that incorporate the semiconductor materials are provided. In particular, a method is provided of producing a semiconductor material, such as a III-V semiconductor, on a spinel substrate using a sacrificial buffer layer, and devices such as photovoltaic cells that incorporate the semiconductor materials. The sacrificial buffer material and semiconductor materials may be deposited using lattice-matching epitaxy or coincident site lattice-matching epitaxy, resulting in a close degree of lattice matching between the substrate material and deposited material for a wide variety of material compositions. The sacrificial buffer layer may be dissolved using an epitaxial liftoff technique in order to separate the semiconductor device from the spinel substrate, and the spinel substrate may be reused in the subsequent fabrication of other semiconductor devices. The low-defect density semiconductor materials produced using this method result in the enhanced performance of the semiconductor devices that incorporate the semiconductor materials.
Public/Granted literature
Information query
IPC分类: