Invention Grant
US09041128B2 Planar cavity MEMS and related structures, methods of manufacture and design structures
有权
平面腔MEMS及相关结构，制造方法和设计结构
- Patent Title: Planar cavity MEMS and related structures, methods of manufacture and design structures
- Patent Title (中): 平面腔MEMS及相关结构，制造方法和设计结构
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Application No.: US13768246Application Date: 2013-02-15
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Publication No.: US09041128B2Publication Date: 2015-05-26
- Inventor: George A. Dunbar, III , Jeffrey C. Maling , William J. Murphy , Anthony K. Stamper
- Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Applicant Address: US NY Armonk
- Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee Address: US NY Armonk
- Agency: Roberts Mlotkowski Safran & Cole, P.C.
- Agent Anthony Canale
- Main IPC: H01L29/84
- IPC: H01L29/84 ; H01H1/00 ; H01L41/113 ; B81C1/00 ; H01H57/00 ; B81B3/00 ; G06F17/50
Abstract:
A Micro-Electro-Mechanical System (MEMS). The MEMS includes a lower chamber with a wiring layer and an upper chamber which is connected to the lower chamber. A MEMS beam is suspended between the upper chamber and the lower chamber. A lid structure encloses the upper chamber, which is devoid of structures that interfere with a MEMS beam. The lid structure has a surface that is conformal to a sacrificial material vented from the upper chamber.
Public/Granted literature
- US20130221454A1 PLANAR CAVITY MEMS AND RELATED STRUCTURES, METHODS OF MANUFACTURE AND DESIGN STRUCTURES Public/Granted day:2013-08-29
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