Invention Grant
- Patent Title: Inertial sensor for detecting angular velocity
- Patent Title (中): 用于检测角速度的惯性传感器
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Application No.: US13592096Application Date: 2012-08-22
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Publication No.: US09052195B2Publication Date: 2015-06-09
- Inventor: Jung Eun Noh , Seung Heon Han , Jong Woon Kim , Sung Jun Lee , Seung Mo Lim
- Applicant: Jung Eun Noh , Seung Heon Han , Jong Woon Kim , Sung Jun Lee , Seung Mo Lim
- Applicant Address: KR Gyunggi-Do
- Assignee: Samsung Electro-Mechanics Co., Ltd.
- Current Assignee: Samsung Electro-Mechanics Co., Ltd.
- Current Assignee Address: KR Gyunggi-Do
- Agency: Ladas & Parry, LLP
- Priority: KR10-2012-0019870 20120227
- Main IPC: G01C19/56
- IPC: G01C19/56 ; G01C19/5684

Abstract:
Disclosed herein is an inertial sensor including: a membrane; first and second driving units provided in a first axis direction (an X axis direction) so as to be symmetrical to each other based on a predetermined point of the membrane to thereby vibrate while being expanded and contracted in the first axis direction; and third and fourth driving units provided in a second axis direction (a Y axis direction) perpendicular to the first axis direction so as to be symmetrical to each other based on a predetermined point of the membrane to thereby vibrate while being expanded and contracted in the second axis direction, wherein the first and second driving units have different vibration frequencies so that they vibrate while being expanded and contracted in the opposite manner and then vibrate while being expanded and contracted in the same manner.
Public/Granted literature
- US20130220015A1 INERTIAL SENSOR Public/Granted day:2013-08-29
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