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US09053955B2 Nitride semiconductor device and method of manufacturing the same 有权
氮化物半导体器件及其制造方法

Nitride semiconductor device and method of manufacturing the same
Abstract:
A nitride semiconductor device includes a dislocation control layer on a substrate, and a nitride semiconductor layer on the dislocation control layer. The dislocation control layer includes a nanocomposite of a first nanoparticle made of a first material and at least one second nanoparticle made of a second material.
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