Invention Grant
US09053957B2 Structure and method for creating a reusable template for detachable thin film substrates
有权
用于制造可分离薄膜基材的可再利用模板的结构和方法
- Patent Title: Structure and method for creating a reusable template for detachable thin film substrates
- Patent Title (中): 用于制造可分离薄膜基材的可再利用模板的结构和方法
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Application No.: US13897323Application Date: 2013-05-17
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Publication No.: US09053957B2Publication Date: 2015-06-09
- Inventor: Suketu Parikh , David Dutton , Pawan Kapur , Somnath Nag , Mehrdad M. Moslehi , Karl-Josef Kramer , Nevran Ozguven , Burcu Ucok
- Applicant: Solexel, Inc.
- Applicant Address: US CA Milpitas
- Assignee: Solexel, Inc.
- Current Assignee: Solexel, Inc.
- Current Assignee Address: US CA Milpitas
- Main IPC: H01L29/06
- IPC: H01L29/06 ; H01L31/0236 ; H01L31/18 ; H01L21/02
Abstract:
A structure and method operable to create a reusable template for detachable thin semiconductor substrates is provided. The reusable template has a three-dimensional (3-D) surface topography comprising a plurality of raised areas comprising a rounded top and separated by a plurality of depressed areas.
Public/Granted literature
- US20130241038A1 STRUCTURE AND METHOD FOR CREATING A REUSABLE TEMPLATE FOR DETACHABLE THIN FILM SUBSTRATES Public/Granted day:2013-09-19
Information query
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