Invention Grant
US09054032B2 Creating an embedded ReRAM memory from a high-k metal gate transistor structure
有权
从高k金属栅极晶体管结构创建嵌入式ReRAM存储器
- Patent Title: Creating an embedded ReRAM memory from a high-k metal gate transistor structure
- Patent Title (中): 从高k金属栅极晶体管结构创建嵌入式ReRAM存储器
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Application No.: US14325580Application Date: 2014-07-08
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Publication No.: US09054032B2Publication Date: 2015-06-09
- Inventor: Dipankar Pramanik , Tony P. Chiang , David E Lazovsky
- Applicant: Intermolecular Inc.
- Applicant Address: US CA San Jose
- Assignee: Intermolecular, Inc.
- Current Assignee: Intermolecular, Inc.
- Current Assignee Address: US CA San Jose
- Main IPC: H01L27/24
- IPC: H01L27/24 ; H01L45/00

Abstract:
An embodiment of the present invention sets forth an embedded resistive memory cell that includes a first stack of deposited layers, a second stack of deposited layers, a first electrode disposed under a first portion of the first stack, and a second electrode disposed under a second portion of the first stack and extending from under the second portion of the first stack to under the second stack. The second electrode is disposed proximate to the first electrode within the embedded resistive memory cell. The first stack of deposited layers includes a dielectric layer, a high-k dielectric layer disposed above the dielectric layer, and a metal layer disposed above the high-k dielectric layer. The second stack of deposited layers includes a high-k dielectric layer formed simultaneously with the high-k dielectric layer included in the first stack, and a metal layer disposed above the high-k dielectric layer.
Public/Granted literature
- US20140319449A1 Creating An Embedded ReRam Memory From A High-K Metal Gate Transistor Structure Public/Granted day:2014-10-30
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