Invention Grant
- Patent Title: Method of forming a nozzle of a fluid ejection device
- Patent Title (中): 形成流体喷射装置的喷嘴的方法
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Application No.: US14039587Application Date: 2013-09-27
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Publication No.: US09056471B2Publication Date: 2015-06-16
- Inventor: David D. L. Wijngaards , Alex N. Westland , Hendrikus J. M. Freriks , René J. Van Der Meer , Maikel A. J. Huygens , Hubertus M. J. M. Boesten
- Applicant: OCE TECHNOLOGIES B.V.
- Applicant Address: NL Venlo
- Assignee: OCE-TECHNOLOGIES B.V.
- Current Assignee: OCE-TECHNOLOGIES B.V.
- Current Assignee Address: NL Venlo
- Agency: Birch, Stewart, Kolasch & Birch, LLP
- Priority: EP11162182 20110413; EP12155985 20120217
- Main IPC: B41J2/14
- IPC: B41J2/14 ; B44C1/22 ; B41J2/16

Abstract:
A method of forming a nozzle of a fluid ejection device, the nozzle having a straight mouth portion and a cavity portion, wherein the mouth portion is formed in a bottom surface of the substrate, and, after passivating the walls of the mouth portion, a wet etch process is applied from the bottom surface of the substrate for forming a part of the cavity portion with walls that diverge from the mouth portion, characterized in that a wet etch process is also applied from a top surface of the substrate for forming a part of the cavity portion which diverges towards the bottom surface and merges with the part that is etched from the bottom surface.
Public/Granted literature
- US20140021168A1 METHOD OF FORMING A NOZZLE OF A FLUID EJECTION DEVICE Public/Granted day:2014-01-23
Information query
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