公开(公告)号：US09056471B2

公开(公告)日：2015-06-16

申请号：US14039587

申请日：2013-09-27

Applicant: OCE TECHNOLOGIES B.V.

Inventor： David D. L. Wijngaards ,  Alex N. Westland ,  Hendrikus J. M. Freriks ,  René J. Van Der Meer ,  Maikel A. J. Huygens ,  Hubertus M. J. M. Boesten

IPC: B41J2/14 ,  B44C1/22 ,  B41J2/16

CPC classification number: B41J2/1629 ,  B41J2/162

Abstract: A method of forming a nozzle of a fluid ejection device, the nozzle having a straight mouth portion and a cavity portion, wherein the mouth portion is formed in a bottom surface of the substrate, and, after passivating the walls of the mouth portion, a wet etch process is applied from the bottom surface of the substrate for forming a part of the cavity portion with walls that diverge from the mouth portion, characterized in that a wet etch process is also applied from a top surface of the substrate for forming a part of the cavity portion which diverges towards the bottom surface and merges with the part that is etched from the bottom surface.

Abstract translation: 一种形成流体喷射装置的喷嘴的方法，所述喷嘴具有直嘴部分和空腔部分，其中所述嘴部形成在所述基板的底表面中，并且在钝化所述口部的壁之后， 从衬底的底表面施加湿蚀刻工艺，以形成具有从口部分开的壁的腔部分的一部分，其特征在于，还从衬底的顶表面施加湿蚀刻工艺以形成部件 的空腔部分朝向底表面分叉并与从底表面蚀刻的部分合并。

公开(公告)号：US09856140B2

公开(公告)日：2018-01-02

申请号：US14512105

申请日：2014-10-10

Applicant: OCE-TECHNOLOGIES B.V.

Inventor： Maikel A. J. Huygens ,  René J. Van Der Meer ,  Reinier Pannekoek ,  Alex N. Westland

IPC: G01R31/02 ,  B81C99/00 ,  B81B7/00 ,  B81C1/00 ,  G01R31/26 ,  H05K1/11 ,  B41J2/14 ,  B41J2/16 ,  H05K1/02

CPC classification number: B81C99/004 ,  B41J2/14233 ,  B41J2/161 ,  B41J2/1632 ,  B41J2/1635 ,  B41J2002/14241 ,  B41J2002/14459 ,  B41J2002/14491 ,  B81B7/007 ,  B81B2201/052 ,  B81B2207/03 ,  B81C1/00301 ,  G01R31/02 ,  G01R31/2601 ,  H05K1/0268 ,  H05K1/111 ,  H05K2201/09372

Abstract: A substrate plate is provided for at least one MEMS device to be mounted thereon. The MEMS device has a certain footprint on the substrate plate, and the substrate plate has a pattern of electrically conductive leads to be connected to electric components of the MEMS device. The pattern forms contact pads within the footprint of the MEMS device and includes at least one lead structure that extends on the substrate plate outside of the footprint of the MEMS device and connects a number of the contact pads to an extra contact pad. The lead structure is a shunt bar that interconnects a plurality of contact pads of the MEMS device and is arranged to be removed by means of a dicing cut separating the substrate plate into a plurality of chip-sized units. At least a major part of the extra contact pad is formed within the footprint of one of the MEMS devices.

公开(公告)号：US08696919B2

公开(公告)日：2014-04-15

申请号：US13678968

申请日：2012-11-16

Applicant: Oce-Technologies B.V.

Inventor： René J. Van Der Meer ,  Hubertus M. J. M. Boesten ,  Maarten J. Bakker ,  David D. L. Wijngaards

IPC: B44C1/22

CPC classification number: B44C1/227 ,  B41J2/162 ,  B41J2/1628 ,  B41J2/1629 ,  B41J2/1631

Abstract: A method for manufacturing a nozzle and an associated funnel in a single plate comprises providing the single plate, the plate being etchable; providing an etch resistant mask on the plate, the mask having a pattern, wherein the pattern comprises a first pattern part for etching the nozzle and a second pattern part for etching the funnel; covering one of the first pattern part and the second pattern part using a first cover; etching one of the nozzle and funnel corresponding to the pattern part not covered in step (c); removing the first cover; etching the other one of the nozzle and funnel; and removing the etch resistant mask.

Abstract translation: 用于在单个板中制造喷嘴和相关漏斗的方法包括提供单个板，该板是可蚀刻的; 在所述板上提供耐蚀刻掩模，所述掩模具有图案，其中所述图案包括用于蚀刻所述喷嘴的第一图案部分和用于蚀刻所述漏斗的第二图案部分; 使用第一盖覆盖第一图案部分和第二图案部分中的一个; 蚀刻对应于步骤（c）未覆盖的图案部分的喷嘴和漏斗中的一个; 移除第一盖; 蚀刻另一个喷嘴和漏斗; 并去除耐蚀刻掩模。