发明授权
- 专利标题: Canister
- 专利标题(中): 罐
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申请号: US13710310申请日: 2012-12-10
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公开(公告)号: US09057125B2公开(公告)日: 2015-06-16
- 发明人: Choel-Min Jang , Myung-Soo Huh , Suk-Won Jung , Sung-Yong Lee , Cheol-Rae Jo , In-Kyo Kim , Sung-Hun Key
- 申请人: SAMSUNG DISPLAY CO., LTD.
- 申请人地址: KR Yongin
- 专利权人: Samsung Display Co., Ltd.
- 当前专利权人: Samsung Display Co., Ltd.
- 当前专利权人地址: KR Yongin
- 代理机构: Knobbe Martens Olson & Bear, LLP
- 优先权: KR10-2012-0087994 20120810
- 主分类号: B01F3/04
- IPC分类号: B01F3/04 ; C23C16/00 ; C23C16/448
摘要:
A canister includes an accommodation portion for accommodating a liquid material; an outlet pipe that is connected to the accommodation portion so as to discharge a gas material obtained by vaporizing the liquid material; a blocking cover that is connected to an upper surface of the accommodation portion; and a plurality of baffle plates that are disposed in the accommodation portion and are spaced apart from each other. The canister further includes a restrictor including a main body member that is disposed between the plurality of baffle plates and the blocking cover and is connected to an internal surface of the accommodation portion, an extension member extending from the main body member, and a through portion that is formed through the main body member and the extension member. A deposition procedure using the canister is efficiently performed and characteristics of a deposition layer are easily improved.
公开/授权文献
- US20140041590A1 CANISTER 公开/授权日:2014-02-13
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