Invention Grant
- Patent Title: Photonics device and CMOS device having a common gate
- Patent Title (中): 具有公共栅极的光子器件和CMOS器件
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Application No.: US14015493Application Date: 2013-08-30
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Publication No.: US09059025B2Publication Date: 2015-06-16
- Inventor: Solomon Assefa , William M. J. Green , Steven M. Shank , Yurii A. Vlasov
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Law Offices of Ira D. Blecker, P.C.
- Main IPC: H01L27/092
- IPC: H01L27/092 ; H01L27/14 ; H01L31/18 ; H01L21/84 ; H01L21/8234 ; H01L27/06 ; H01L21/28

Abstract:
A semiconductor chip having a photonics device and a CMOS device which includes a photonics device portion and a CMOS device portion on a semiconductor chip; a metal or polysilicon gate on the CMOS device portion, the metal or polysilicon gate having a gate extension that extends toward the photonics device portion; a germanium gate on the photonics device portion such that the germanium gate is coplanar with the metal or polysilicon gate, the germanium gate having a gate extension that extends toward the CMOS device portion, the germanium gate extension and metal or polysilicon gate extension joined together to form a common gate; spacers formed on the germanium gate and the metal or polysilicon gate; and nitride encapsulation formed on the germanium gate.
Public/Granted literature
- US20140191326A1 PHOTONICS DEVICE AND CMOS DEVICE HAVING A COMMON GATE Public/Granted day:2014-07-10
Information query
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