Invention Grant
US09059403B2 Memory structures, memory arrays, methods of forming memory structures and methods of forming memory arrays
有权
存储器结构,存储器阵列,形成存储器结构的方法和形成存储器阵列的方法
- Patent Title: Memory structures, memory arrays, methods of forming memory structures and methods of forming memory arrays
- Patent Title (中): 存储器结构,存储器阵列,形成存储器结构的方法和形成存储器阵列的方法
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Application No.: US14455298Application Date: 2014-08-08
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Publication No.: US09059403B2Publication Date: 2015-06-16
- Inventor: Scott E. Sills
- Applicant: Micron Technology, Inc.
- Applicant Address: US ID Boise
- Assignee: Micron Technology, Inc.
- Current Assignee: Micron Technology, Inc.
- Current Assignee Address: US ID Boise
- Agency: Wells St. John P.S.
- Main IPC: H01L45/00
- IPC: H01L45/00 ; H01L27/24

Abstract:
Some embodiments include methods of forming memory structures. An electrically insulative line is formed over a base. Electrode material is deposited over the line and patterned to form a pair of bottom electrodes along the sidewalls of the line. Programmable material is formed over the bottom electrodes, and a top electrode is formed over the programmable material. The bottom electrodes may each contain at least one segment which extends at angle of from greater than 0° to less than or equal to about 90° relative to a planar topography of the base. Some embodiments include memory structures having a bottom electrode extending upwardly from a conductive contact to a programmable material, with the bottom electrode having a thickness of less than or equal to about 10 nanometers. Some embodiments include memory arrays and methods of forming memory arrays.
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