Invention Grant
- Patent Title: Method of monitoring photoactive organic molecules in-situ during gas-phase deposition of the photoactive organic molecules
- Patent Title (中): 在光活性有机分子的气相沉积期间原位监测光活性有机分子的方法
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Application No.: US13652593Application Date: 2012-10-16
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Publication No.: US09062368B2Publication Date: 2015-06-23
- Inventor: Stephen R. Forrest , Garen Vartanian , Cedric Rolin
- Applicant: The Regents of the University of Michigan
- Applicant Address: US MI Ann Arbor
- Assignee: The Regents of the University of Michigan
- Current Assignee: The Regents of the University of Michigan
- Current Assignee Address: US MI Ann Arbor
- Agency: Duane Morris LLP
- Main IPC: C23C14/52
- IPC: C23C14/52 ; C23C14/12 ; C23C14/24 ; C23C14/54 ; G01N21/64 ; G01N21/84
Abstract:
A method for in-situ monitoring of gas-phase photoactive organic molecules in real time while depositing a film of the photoactive organic molecules on a substrate in a processing chamber for depositing the film includes irradiating the gas-phase photoactive organic molecules in the processing chamber with a radiation from a radiation source in-situ while depositing the film of the one or more organic materials and measuring the intensity of the resulting photoluminescence emission from the organic material. One or more processing parameters associated with the deposition process can be determined from the photoluminescence intensity data in real time providing useful feedback on the deposition process.
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