Invention Grant
- Patent Title: Rectangular parallelepiped fluid storage and dispensing vessel
- Patent Title (中): 矩形平行六面体流体储存和分配容器
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Application No.: US13966091Application Date: 2013-08-13
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Publication No.: US09062829B2Publication Date: 2015-06-23
- Inventor: Dennis Brestovansky , Michael J. Wodjenski , Jose I. Arno , J. Donald Carruthers , Philip A. Moroco
- Applicant: Judith A. Moroco , Advanced Technology Materials, Inc.
- Applicant Address: US MA Billerica
- Assignee: ENTEGRIS, INC.
- Current Assignee: ENTEGRIS, INC.
- Current Assignee Address: US MA Billerica
- Agency: Hultquist, PLLC
- Agent Steven J. Hultquist; Rosa Yaghmour
- Main IPC: B01D53/04
- IPC: B01D53/04 ; F17C11/00

Abstract:
A fluid storage and dispensing apparatus including a fluid storage and dispensing vessel having a rectangular parallelepiped shape, and an integrated gas cabinet assembly including such fluid storage and dispensing apparatus and/or a point-of-use ventilation gas scrubber in the vented gas cabinet. By the use of physical adsorbent and chemical sorbent media, the gas cabinet can be enhanced in safety of operation, e.g., where the process gas supplied from the gas cabinet is of a toxic or otherwise hazardous character.
Public/Granted literature
- US20130334068A1 RECTANGULAR PARALLELEPIPED FLUID STORAGE AND DISPENSING VESSEL Public/Granted day:2013-12-19
Information query
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