发明授权
- 专利标题： Rectangular parallelepiped fluid storage and dispensing vessel
- 专利标题（中）： 矩形平行六面体流体储存和分配容器
-
申请号： US13966091申请日： 2013-08-13
-
公开(公告)号： US09062829B2公开(公告)日： 2015-06-23
- 发明人: Dennis Brestovansky , Michael J. Wodjenski , Jose I. Arno , J. Donald Carruthers , Philip A. Moroco
- 申请人： Judith A. Moroco , Advanced Technology Materials, Inc.
- 申请人地址： US MA Billerica
- 专利权人： ENTEGRIS, INC.
- 当前专利权人： ENTEGRIS, INC.
- 当前专利权人地址： US MA Billerica
- 代理机构： Hultquist, PLLC
- 代理商 Steven J. Hultquist; Rosa Yaghmour
- 主分类号： B01D53/04
- IPC分类号： B01D53/04 ; F17C11/00
摘要：
A fluid storage and dispensing apparatus including a fluid storage and dispensing vessel having a rectangular parallelepiped shape, and an integrated gas cabinet assembly including such fluid storage and dispensing apparatus and/or a point-of-use ventilation gas scrubber in the vented gas cabinet. By the use of physical adsorbent and chemical sorbent media, the gas cabinet can be enhanced in safety of operation, e.g., where the process gas supplied from the gas cabinet is of a toxic or otherwise hazardous character.