Invention Grant
- Patent Title: Component having a micromechanical microphone structure
- Patent Title (中): 具有微机械麦克风结构的部件
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Application No.: US13787272Application Date: 2013-03-06
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Publication No.: US09066180B2Publication Date: 2015-06-23
- Inventor: Jochen Zoellin , Christoph Schelling
- Applicant: Robert Bosch GmbH
- Applicant Address: DE Stuttgart
- Assignee: ROBERT BOSCH GMBH
- Current Assignee: ROBERT BOSCH GMBH
- Current Assignee Address: DE Stuttgart
- Agency: Kenyon & Kenyon LLP
- Priority: GB102012203900 20120313
- Main IPC: H04R25/00
- IPC: H04R25/00 ; H04R1/08 ; H04R19/04 ; H04R19/00

Abstract:
A micromechanical microphone structure configured as a layered structure includes: a semiconductor substrate; a diaphragm structure having an acoustically active diaphragm which at least partially spans a sound opening in the back side of the substrate and is provided with a movable electrode of a microphone capacitor, which diaphragm structure has openings via which pressure compensation occurs between the back side and the front side of the diaphragm; a stationary acoustically permeable counterelement having vents, which counterelement is situated in the layered structure above the diaphragm and which functions as a carrier for a nonmovable electrode of the microphone capacitor; and at least one ridge-like structural element which is situated at the outer edge area of the diaphragm, and which protrudes from the diaphragm plane into corresponding recesses in an adjoining layer.
Public/Granted literature
- US20130243234A1 COMPONENT HAVING A MICROMECHANICAL MICROPHONE STRUCTURE Public/Granted day:2013-09-19
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