发明授权
- 专利标题： Micromachined structures
- 专利标题（中）： 微加工结构
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申请号： US13343187申请日： 2012-01-04
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公开(公告)号： US09070699B2公开(公告)日： 2015-06-30
- 发明人: Chuanwei Wang , Ming Han Tsai , Chih Ming Sun , Weileun Fang
- 申请人： Chuanwei Wang , Ming Han Tsai , Chih Ming Sun , Weileun Fang
- 申请人地址： TW Hsin-Chu
- 专利权人： PIXART IMAGING INC.
- 当前专利权人： PIXART IMAGING INC.
- 当前专利权人地址： TW Hsin-Chu
- 代理机构： Lowe Hauptman & Ham, LLP
- 优先权： TW96139618A 20071023
- 主分类号： H01L21/00
- IPC分类号： H01L21/00 ; H01L49/02 ; H01L29/84
摘要：
A micromachined structure includes a substrate and a suspended structure. The substrate has a cavity formed thereon. The suspended structure is formed on the cavity of the substrate. The suspended structure includes a first metal layer, a second metal layer, and a first dielectric layer positioned between the first and second metal layers, wherein the first dielectric layer has a first opening in communication with the cavity through an opening formed in the first metal layer.
公开/授权文献
- US20120107545A1 MICROMACHINED STRUCTURES 公开/授权日：2012-05-03
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