发明授权
- 专利标题： Light collector mirror cleaning
- 专利标题（中）： 集光镜清洗
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申请号： US13473529申请日： 2012-05-16
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公开(公告)号： US09073098B2公开(公告)日： 2015-07-07
- 发明人: Silvia De Dea , Michael Varga , Alexander I. Ershov , Robert L. Morse
- 申请人： Silvia De Dea , Michael Varga , Alexander I. Ershov , Robert L. Morse
- 申请人地址： NL
- 专利权人： ASML Netherlands B.V.
- 当前专利权人： ASML Netherlands B.V.
- 当前专利权人地址： NL
- 代理机构： DiBerardino McGovern IP Group LLC
- 主分类号： B08B3/02
- IPC分类号： B08B3/02 ; B08B3/04 ; B08B3/08 ; B08B11/02 ; G03F7/20 ; G02B27/00 ; B23K26/06 ; B23K26/16
摘要：
A collector mirror of an extreme ultraviolet light source is cleaned by removing the collector mirror from a chamber of the extreme ultraviolet light source; mounting the collector mirror to a carrier; inserting the carrier with the collector mirror into a cleaning tank; applying a cleaning agent to a reflective surface of the collector mirror by spraying the cleaning agent through a plurality of nozzles directed toward the collector mirror reflective surface until the collector mirror reflective surface is clean; rinsing the applied cleaning agent from the collector mirror reflective surface; and drying the collector mirror reflective surface.
公开/授权文献
- US20130306110A1 Light Collector Mirror Cleaning 公开/授权日：2013-11-21
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