发明授权
- 专利标题： Microelectromechanical accelerometer with wireless transmission capabilities
- 专利标题（中）： 具有无线传输能力的微机电加速度计
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申请号： US13241665申请日： 2011-09-23
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公开(公告)号： US09075078B2公开(公告)日： 2015-07-07
- 发明人: Horst Theuss
- 申请人： Horst Theuss
- 申请人地址： DE Neubiberg
- 专利权人： INFINEON TECHNOLOGIES AG
- 当前专利权人： INFINEON TECHNOLOGIES AG
- 当前专利权人地址： DE Neubiberg
- 优先权： DE102010046797 20100928
- 主分类号： G01P15/12
- IPC分类号： G01P15/12 ; G01P1/02 ; G01P15/11 ; G01P15/125 ; G01P15/18 ; G01P15/08
摘要：
In various embodiments, a microelectromechanical system may include a mass element; a substrate; a signal generator; and a fixing structure configured to fix the mass element to the substrate; wherein the mass element is fixed in such a way that, upon an acceleration of the microelectromechanical system, the mass element can be moved relative to the substrate in at least two spatial directions, and wherein a signal is generated by the movement of the mass element by means of the signal generator.
公开/授权文献
- US20120073371A1 MICROELECTROMECHANICAL SENSOR 公开/授权日：2012-03-29
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