发明授权
- 专利标题： Particle detection system
- 专利标题（中）： 粒子检测系统
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申请号： US13939675申请日： 2013-07-11
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公开(公告)号： US09076629B2公开(公告)日： 2015-07-07
- 发明人: Yi-Xiang Wang , Joe Wang , Wei-Ming Ren
- 申请人： Hermes Microvision Inc.
- 申请人地址： TW Hsinchu
- 专利权人： HERMES MICROVISION INC.
- 当前专利权人： HERMES MICROVISION INC.
- 当前专利权人地址： TW Hsinchu
- 代理机构： WPAT, PC
- 代理商 Justin King
- 主分类号： H01J37/244
- IPC分类号： H01J37/244 ; H01J37/28
摘要：
This invention provides a design to process a large range of detection beam current at low noise with a single detector. With such a design, the detection system can generate up to 1010 gain and maximum signal output at more than mini Ampere (mA) level. A condenser lens is configured to increase bandwidth of the detector that scan speed can be enhanced.
公开/授权文献
- US20130327953A1 PARTICLE DETECTION SYSTEM 公开/授权日：2013-12-12