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1.发明授权Dynamic focus adjustment with optical height detection apparatus in electron beam system 有权电子束系统中光学高度检测装置的动态聚焦调整公开(公告)号：US09400176B2
公开(公告)日：2016-07-26
申请号：US14306298
申请日：2014-06-17
发明人： Joe Wang , Van-Duc Nguyen , Yi-Xiang Wang , Jack Jau , Zhong-Wei Chen
CPC分类号： G01B11/22 , G01N23/04 , G01N23/20058 , G01N2223/32 , G01N2223/3301 , G01N2223/3302 , G01N2223/646 , H01J37/21 , H01J37/28 , H01J2237/216 , H01J2237/2482 , H01J2237/2487
摘要： The present invention generally relates to dynamic focus adjustment for an image system. With the assistance of a height detection sub-system, present invention provides an apparatus and methods for micro adjusting an image focusing according the specimen surface height variation by altering the field strength of an electrostatic lens between objective lens and sample stage/or a bias voltage applied to the sample surface. Merely by way of example, the invention has been applied to a scanning electron inspection system. But it would be recognized that the invention could apply to other system using charged particle beam as observation tool with a height detection apparatus.
摘要翻译： 本发明一般涉及图像系统的动态聚焦调整。 本发明借助于高度检测子系统，提供了一种用于通过改变物镜和样品台之间的静电透镜的场强/或偏置电压来根据样本表面高度变化来微调整图像聚焦的装置和方法 应用于样品表面。 仅作为示例，本发明已经应用于扫描电子检查系统。 但是应当认识到，本发明可以应用于使用带有带电粒子束的其它系统作为具有高度检测装置的观察工具。
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公开(公告)号：US09384936B2
公开(公告)日：2016-07-05
申请号：US14800098
申请日：2015-07-15
发明人： Weiming Ren , Joe Wang , Shuai Li , Zhongwei Chen
CPC分类号： H01J37/05 , H01J37/10 , H01J37/12 , H01J37/244 , H01J37/263 , H01J37/28 , H01J2237/057 , H01J2237/12 , H01J2237/14
摘要： This invention provides two methods for improving performance of an energy-discrimination detection device with an energy filter of reflective type for a charged particle beam. The first method employs a beam-adjusting means to improve the energy-discrimination power, and the second method uses an electron-multiplication means to enhance the image signal without noise raise. A LVSEM with such an improved energy-discrimination detection device can provide variant high-contrast images of interested features on a specimen surface for multiple application purposes.
摘要翻译： 本发明提供了两种用于利用带电粒子束的反射型能量滤波器来改善能量鉴别检测装置的性能的方法。 第一种方法采用光束调节装置来提高能量鉴别能力，而第二种方法使用电子倍增装置来增强图像信号而没有噪声提高。 具有这种改进的能量鉴别检测装置的LVSEM可以在样本表面上提供用于多种应用目的的感兴趣特征的变体高对比度图像。
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公开(公告)号：US09002097B1
公开(公告)日：2015-04-07
申请号：US13776939
申请日：2013-02-26
发明人： Chiyan Kuan , Joe Wang , Van-Duc Nguyen
CPC分类号： G06T5/50 , G01N21/9501 , G01N23/2251 , G01N2223/42 , G01N2223/6116 , G03F1/86 , G03F7/7065 , G06K9/40 , G06T5/005 , G06T5/006 , G06T5/40 , G06T2207/20172 , G06T2207/20216 , G06T2207/30148 , H01J37/222 , H01J37/28
摘要： This invention relates to methods and systems for enhance the signal-to-noise ratio of an image scanned by a charged particle beam. In an embodiment, a sequence of grayscales of a pixel is recorded first, extreme values of the sequence of grayscales are then identified and removed, and the remained grayscales are used to determine a nominated grayscale of the pixel.
摘要翻译： 本发明涉及用于增强由带电粒子束扫描的图像的信噪比的方法和系统。 在一个实施例中，首先记录像素的灰度序列，然后识别和去除灰度序列的极值，并且使用剩余的灰度级来确定像素的指定灰度级。
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公开(公告)号：US09436985B1
公开(公告)日：2016-09-06
申请号：US14595582
申请日：2015-01-13
发明人： Chiyan Kuan , Joe Wang , Van-Duc Nguyen
CPC分类号： G06T5/50 , G01N21/9501 , G01N23/2251 , G01N2223/42 , G01N2223/6116 , G03F1/86 , G03F7/7065 , G06K9/40 , G06T5/005 , G06T5/006 , G06T5/40 , G06T2207/20172 , G06T2207/20216 , G06T2207/30148 , H01J37/222 , H01J37/28
摘要： This invention relates to methods and systems for enhance the signal-to-noise ratio of an image scanned by a charged particle beam. In an embodiment, a sequence of grayscales of a pixel is recorded first, extreme values of the sequence of grayscales are then identified and removed, and the remained grayscales are used to determine a nominated grayscale of the pixel.
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公开(公告)号：US20160035533A1
公开(公告)日：2016-02-04
申请号：US14800098
申请日：2015-07-15
发明人： Weiming Ren , Joe Wang , Shuai Li , Zhongwei Chen
CPC分类号： H01J37/05 , H01J37/10 , H01J37/12 , H01J37/244 , H01J37/263 , H01J37/28 , H01J2237/057 , H01J2237/12 , H01J2237/14
摘要： This invention provides two methods for improving performance of an energy-discrimination detection device with an energy filter of reflective type for a charged particle beam. The first method employs a beam-adjusting means to improve the energy-discrimination power, and the second method uses an electron-multiplication means to enhance the image signal without noise raise. A LVSEM with such an improved energy-discrimination detection device can provide variant high-contrast images of interested features on a specimen surface for multiple application purposes.
摘要翻译： 本发明提供了两种用于利用带电粒子束的反射型能量滤波器来改善能量鉴别检测装置的性能的方法。 第一种方法采用光束调节装置来提高能量鉴别能力，第二种方法使用电子倍增装置来增强图像信号而没有噪声提高。 具有这种改进的能量鉴别检测装置的LVSEM可以在样本表面上提供用于多种应用目的的感兴趣特征的变体高对比度图像。
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公开(公告)号：US09076629B2
公开(公告)日：2015-07-07
申请号：US13939675
申请日：2013-07-11
发明人： Yi-Xiang Wang , Joe Wang , Wei-Ming Ren
IPC分类号： H01J37/244 , H01J37/28
CPC分类号： H01J37/244 , H01J37/28 , H01J2237/24435 , H01J2237/2444 , H01J2237/2449
摘要： This invention provides a design to process a large range of detection beam current at low noise with a single detector. With such a design, the detection system can generate up to 1010 gain and maximum signal output at more than mini Ampere (mA) level. A condenser lens is configured to increase bandwidth of the detector that scan speed can be enhanced.
摘要翻译： 本发明提供了利用单个检测器处理低噪声的大范围检测光束电流的设计。 通过这样的设计，检测系统可以以超过小于安培（mA）的电平产生多达1010个增益和最大信号输出。 配置聚光透镜以增加检测器的带宽，可以提高扫描速度。
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