发明授权
- 专利标题： Patterning slit sheet assembly, organic layer deposition apparatus, method of manufacturing organic light-emitting display apparatus, and the organic light-emitting display apparatus
- 专利标题（中）： 图案化狭缝片组件，有机层沉积装置，有机发光显示装置的制造方法和有机发光显示装置
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申请号： US14222472申请日： 2014-03-21
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公开(公告)号： US09076982B2公开(公告)日： 2015-07-07
- 发明人: Sung-Bong Lee , Myung-Ki Lee , Myong-Hwan Choi , Mu-Hyun Kim
- 申请人： Samsung Display Co., Ltd.
- 申请人地址： KR Yongin-si
- 专利权人： Samsung Display Co., Ltd.
- 当前专利权人： Samsung Display Co., Ltd.
- 当前专利权人地址： KR Yongin-si
- 代理机构： Christie, Parker & Hale, LLP
- 优先权： KR10-2011-0049791 20110525
- 主分类号： B05C1/00
- IPC分类号： B05C1/00 ; H01L51/52 ; C23C14/04 ; H01L51/56 ; H01L51/00
摘要：
A patterning slit sheet assembly for performing a deposition process to form a thin film on a substrate in a desired fine pattern. The patterning slit sheet assembly includes a patterning slit sheet having a plurality of slits, a frame combined with the patterning slit sheet to support the patterning slit sheet, and a support unit including an upper member that is allowed to be moved or fixed to support the patterning slit sheet when a gravitational force is applied to the patterning slit sheet and a lower member disposed more apart from the patterning slit sheet than the upper member, wherein the upper member is fixed on the lower member.
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