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1.发明授权公开(公告)号：US09570714B2
公开(公告)日：2017-02-14
申请号：US13794659
申请日：2013-03-11
发明人： Myung-Ki Lee , Sung-Bong Lee , Dong-Seob Jeong , Mu-Hyun Kim
CPC分类号： H01L51/56 , C23C14/042 , C23C14/24 , H01L51/0011 , H01L51/52
摘要： An organic layer deposition assembly, an organic layer deposition apparatus, an organic light-emitting display apparatus, and a method of manufacturing the organic light-emitting display apparatus, in order to improve a characteristic of a deposited layer, the organic layer deposition assembly including a deposition source for discharging a deposition material; a deposition source nozzle unit disposed at a side of the deposition source, and including a plurality of deposition source nozzles; and a patterning slit sheet disposed while facing the deposition source nozzle unit, and including a plurality of patterning slits and one or more alignment confirmation pattern slits that are formed at edge portions of the plurality of patterning slits, wherein the deposition material that is discharged from the deposition source passes through the patterning slit sheet and then is formed on the substrate, while a deposition process is performed.
摘要翻译： 有机层沉积组件，有机层沉积设备，有机发光显示设备和制造有机发光显示设备的方法，为了提高沉积层的特性，有机层沉积组件包括 用于排出沉积材料的沉积源; 沉积源喷嘴单元，设置在沉积源的一侧，并且包括多个沉积源喷嘴; 以及与所述沉积源喷嘴单元相对设置的图案化缝隙片，并且包括形成在所述多个图案化缝隙的边缘部分处的多个图案化缝隙和一个或多个取向确认图案狭缝，其中，从 沉积源通过图案化缝隙片，然后形成在衬底上，同时进行沉积工艺。
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2.发明申请公开(公告)号：US20150275347A1
公开(公告)日：2015-10-01
申请号：US14740201
申请日：2015-06-15
发明人： Sang-Yong Jeong , Myung-Ki Lee , Sang-Youn Kim , You-Sung Jeon
IPC分类号： C23C14/04
CPC分类号： C23C14/042 , C23C14/54 , G01B11/14 , H01L21/67288 , H01L51/0011 , H01L51/56
摘要： A thin film deposition apparatus includes: a chamber; a mask stage in the chamber and configured to support a mask; a jig in the chamber and above the mask stage, the jig being configured to move in a direction of the mask stage; and a rail in the chamber and configured to support the movement of the jig. Another thin film deposition apparatus includes a chamber, a mask stage positioned within the chamber and configured to support a mask, a camera part proximate to a side of the mask stage, and a jig above the mask stage and configured to move in a direction of the mask stage and over the camera part. The jig is further configured to radiate laser beams in a downward direction from the jig to obtain first scanning data regarding the mask stage and second scanning data regarding the camera part.
摘要翻译： 薄膜沉积设备包括：室; 在所述室中的掩模台，并且构造成支撑掩模; 在所述腔室中和所述掩模台上方的夹具，所述夹具被构造成沿所述掩模台的方向移动; 以及所述腔室中的导轨，并且构造成支撑所述夹具的移动。 另一薄膜沉积装置包括一个腔室，一个位于该腔室内并配置成支撑一个掩模，一个靠近该掩模台一侧的照相机部件和一个位于掩模台上方的夹具的掩模台， 面具舞台和相机部分。 夹具进一步构造成从夹具向下辐射激光束，以获得关于掩模台的第一扫描数据和关于相机部件的第二扫描数据。
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3.发明授权公开(公告)号：US09076982B2
公开(公告)日：2015-07-07
申请号：US14222472
申请日：2014-03-21
发明人： Sung-Bong Lee , Myung-Ki Lee , Myong-Hwan Choi , Mu-Hyun Kim
CPC分类号： H01L51/5203 , C23C14/042 , H01L51/0011 , H01L51/56
摘要： A patterning slit sheet assembly for performing a deposition process to form a thin film on a substrate in a desired fine pattern. The patterning slit sheet assembly includes a patterning slit sheet having a plurality of slits, a frame combined with the patterning slit sheet to support the patterning slit sheet, and a support unit including an upper member that is allowed to be moved or fixed to support the patterning slit sheet when a gravitational force is applied to the patterning slit sheet and a lower member disposed more apart from the patterning slit sheet than the upper member, wherein the upper member is fixed on the lower member.
摘要翻译： 一种图案化缝隙片组件，用于执行沉积工艺以在所需的精细图案中在衬底上形成薄膜。 图形化缝隙片组件包括具有多个狭缝的图案化缝隙片，与图案化缝隙片组合以支撑图案化缝隙片的框架，以及支撑单元，其包括允许移动或固定以支撑图案化缝隙片的上部构件 当向图案化缝隙片施加重力时构图缝隙片和与图案化缝隙片比上部构件更远离的下部构件，其中上部构件固定在下部构件上。
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4.发明申请公开(公告)号：US20140034917A1
公开(公告)日：2014-02-06
申请号：US13794659
申请日：2013-03-11
发明人： Myung-Ki Lee , Sung-Bong Lee , Dong-Seob Jeong , Mu-Hyun Kim
CPC分类号： H01L51/56 , C23C14/042 , C23C14/24 , H01L51/0011 , H01L51/52
摘要： An organic layer deposition assembly, an organic layer deposition apparatus, an organic light-emitting display apparatus, and a method of manufacturing the organic light-emitting display apparatus, in order to improve a characteristic of a deposited layer, the organic layer deposition assembly including a deposition source for discharging a deposition material; a deposition source nozzle unit disposed at a side of the deposition source, and including a plurality of deposition source nozzles; and a patterning slit sheet disposed while facing the deposition source nozzle unit, and including a plurality of patterning slits and one or more alignment confirmation pattern slits that are formed at edge portions of the plurality of patterning slits, wherein the deposition material that is discharged from the deposition source passes through the patterning slit sheet and then is formed on the substrate, while a deposition process is performed.
摘要翻译： 有机层沉积组件，有机层沉积设备，有机发光显示设备和制造有机发光显示设备的方法，为了提高沉积层的特性，有机层沉积组件包括 用于排出沉积材料的沉积源; 沉积源喷嘴单元，设置在沉积源的一侧，并且包括多个沉积源喷嘴; 以及与所述沉积源喷嘴单元相对设置的图案化缝隙片，并且包括形成在所述多个图案化缝隙的边缘部分处的多个图案化缝隙和一个或多个取向确认图案狭缝，其中，从 沉积源通过图案化缝隙片，然后形成在衬底上，同时进行沉积工艺。
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5.发明申请Organic Layer Deposition Apparatus, Frame Sheet Assembly For The Organic Layer Deposition Apparatus, And Method Of Manufacturing Organic Light Emitting Display Device Using The Frame Sheet Assembly 审中-公开有机层沉积装置，用于有机层沉积装置的框架板组件和使用框架组件制造有机发光显示装置的方法公开(公告)号：US20150217319A1
公开(公告)日：2015-08-06
申请号：US14691490
申请日：2015-04-20
发明人： Myong-Hwan Choi , Sung-Bong Lee , Myung-Ki Lee , Mu-Hyun Kim
CPC分类号： B05B1/20 , B05B7/1686 , C23C14/042 , C23C14/12 , C23C14/24 , C23C14/243 , H01L51/56
摘要： An organic layer deposition apparatus capable of protecting or preventing a patterning slit sheet from sagging, and a frame sheet assembly for the organic layer deposition apparatus.
摘要翻译： 一种能够保护或防止图案化狭缝片下垂的有机层沉积装置和用于有机层沉积装置的框架片组件。
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6.发明申请公开(公告)号：US20140203264A1
公开(公告)日：2014-07-24
申请号：US14222472
申请日：2014-03-21
发明人： Sung-Bong Lee , Myung-Ki Lee , Myong-Hwan Choi , Mu-Hyun Kim
CPC分类号： H01L51/5203 , C23C14/042 , H01L51/0011 , H01L51/56
摘要： A patterning slit sheet assembly for performing a deposition process to form a thin film on a substrate in a desired fine pattern. The patterning slit sheet assembly includes a patterning slit sheet having a plurality of slits, a frame combined with the patterning slit sheet to support the patterning slit sheet, and a support unit including an upper member that is allowed to be moved or fixed to support the patterning slit sheet when a gravitational force is applied to the patterning slit sheet and a lower member disposed more apart from the patterning slit sheet than the upper member, wherein the upper member is fixed on the lower member.
摘要翻译： 一种图案化缝隙片组件，用于执行沉积工艺以在所需的精细图案中在衬底上形成薄膜。 图形化缝隙片组件包括具有多个狭缝的图案化缝隙片，与图案化缝隙片组合以支撑图案化缝隙片的框架，以及支撑单元，其包括允许移动或固定以支撑图案化缝隙片的上部构件 当向图案化缝隙片施加重力时构图缝隙片和与图案化缝隙片比上部构件更远离的下部构件，其中上部构件固定在下部构件上。
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公开(公告)号：US11919287B2
公开(公告)日：2024-03-05
申请号：US17864497
申请日：2022-07-14
发明人： Myung-Ki Lee , Junkeun Ahn , Yewon Cho , Dongjin Park
CPC分类号： B32B7/12 , B32B17/06 , B32B2307/42 , B32B2307/54 , B32B2307/732 , B32B2457/20
摘要： A foldable display device includes a display panel including a first non-folding area including a bending area and a non-bending area, a folding area connected to the first non-folding area, and a second non-folding area spaced apart from the first non-folding area by the folding area, an adhesive layer disposed on the non-bending area of the display panel and having a first height in a direction perpendicular to a main plane extension direction of the display panel, a polarizing layer disposed on the adhesive layer and a bending protective layer disposed on the bending area of the display panel and having a second height, in the direction, lower than the first height.
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8.发明授权公开(公告)号：US09455170B2
公开(公告)日：2016-09-27
申请号：US14230523
申请日：2014-03-31
发明人： Sang-Youn Kim , Myung-Ki Lee , Sang-Yong Jeong
IPC分类号： H01L51/00 , H01L21/677
CPC分类号： H01L21/6776 , H01L51/0011
摘要： A deposition apparatus includes a deposition unit including a plurality of deposition assemblies, which are separated from a substrate at a predetermined distance and deposit a material onto the substrate while a first transfer unit transfers the substrate. Each of the plurality of deposition assemblies includes a patterning slit sheet facing a deposition source nozzle unit, a positional information obtaining unit obtaining positional information regarding a position of the substrate transferred by the first transfer unit, and a sheet stage adjusting a position of the patterning slit sheet with respect to the substrate transferred by the first transfer unit according to the positional information.
摘要翻译： 沉积设备包括沉积单元，该沉积单元包括多个沉积组件，其以预定距离与基底分离，并且在第一转移单元转移衬底的同时将材料沉积到衬底上。 多个沉积组件中的每一个包括面向沉积源喷嘴单元的图案化缝隙片，位置信息获取单元获得关于由第一转印单元转印的基底的位置的位置信息，以及片段调整图案形成位置 根据位置信息相对于由第一传送单元传送的基板的狭缝片。
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公开(公告)号：US09435020B2
公开(公告)日：2016-09-06
申请号：US14740201
申请日：2015-06-15
发明人： Sang-Yong Jeong , Myung-Ki Lee , Sang-Youn Kim , You-Sung Jeon
CPC分类号： C23C14/042 , C23C14/54 , G01B11/14 , H01L21/67288 , H01L51/0011 , H01L51/56
摘要： A thin film deposition apparatus includes: a chamber; a mask stage in the chamber and configured to support a mask; a jig in the chamber and above the mask stage, the jig being configured to move in a direction of the mask stage; and a rail in the chamber and configured to support the movement of the jig. Another thin film deposition apparatus includes a chamber, a mask stage positioned within the chamber and configured to support a mask, a camera part proximate to a side of the mask stage, and a jig above the mask stage and configured to move in a direction of the mask stage and over the camera part. The jig is further configured to radiate laser beams in a downward direction from the jig to obtain first scanning data regarding the mask stage and second scanning data regarding the camera part.
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10.发明授权公开(公告)号：US09115427B2
公开(公告)日：2015-08-25
申请号：US14042413
申请日：2013-09-30
发明人： Sang-Yong Jeong , Myung-Ki Lee , Sang-Youn Kim , You-Sung Jeon
CPC分类号： C23C14/042 , C23C14/54 , G01B11/14 , H01L21/67288 , H01L51/0011 , H01L51/56
摘要： A thin film deposition apparatus includes: a chamber; a mask stage in the chamber and configured to support a mask; a jig in the chamber and above the mask stage, the jig being configured to move in a direction of the mask stage; and a rail in the chamber and configured to support the movement of the jig. Another thin film deposition apparatus includes a chamber, a mask stage positioned within the chamber and configured to support a mask, a camera part proximate to a side of the mask stage, and a jig above the mask stage and configured to move in a direction of the mask stage and over the camera part. The jig is further configured to radiate laser beams in a downward direction from the jig to obtain first scanning data regarding the mask stage and second scanning data regarding the camera part.
摘要翻译： 薄膜沉积设备包括：室; 在所述室中的掩模台，并且构造成支撑掩模; 在所述腔室中和所述掩模台上方的夹具，所述夹具被构造成沿所述掩模台的方向移动; 以及所述腔室中的导轨，并且构造成支撑所述夹具的移动。 另一薄膜沉积装置包括一个腔室，一个位于该腔室内并配置成支撑一个掩模，一个靠近该掩模台一侧的照相机部件和一个位于掩模台上方的夹具的掩模台， 面具舞台和相机部分。 该夹具进一步构造成从夹具沿向下的方向辐射激光束，以获得关于掩模台的第一扫描数据和关于相机部件的第二扫描数据。
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