Invention Grant
US09079318B2 Self-aligning pick-up head and method for manufacturing a device with the self-aligning pick-up head
有权
自动对位拾取头和用于制造具有自对准拾取头的装置的方法
- Patent Title: Self-aligning pick-up head and method for manufacturing a device with the self-aligning pick-up head
- Patent Title (中): 自动对位拾取头和用于制造具有自对准拾取头的装置的方法
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Application No.: US13722834Application Date: 2012-12-20
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Publication No.: US09079318B2Publication Date: 2015-07-14
- Inventor: Horst Groeninger , Konrad Roesl
- Applicant: Infineon Technologies AG
- Applicant Address: DE Neubiberg
- Assignee: Infineon Technologies AG
- Current Assignee: Infineon Technologies AG
- Current Assignee Address: DE Neubiberg
- Agency: Slater & Matsil, L.L.P.
- Main IPC: A47J45/00
- IPC: A47J45/00 ; B25J15/06 ; H01L21/67 ; H01L21/683
Abstract:
A self-aligning pick-up head, a method to manufacture a pick-up head and a method of manufacturing a device are disclosed. In one embodiment a pick-up head includes a nozzle having a first end portion and a second end portion and a base tool comprising a collet head, wherein the first end portion of the nozzle is gimbaled to the base tool.
Public/Granted literature
- US20140174652A1 Self-Aligning Pick-up Head and Method for Manufacturing a Device with the Self-Aligning Pick-up Head Public/Granted day:2014-06-26
Information query
