Invention Grant
- Patent Title: Pneumatic clamping mechanism for cells with adjustable height
- Patent Title (中): 气动夹紧机构，适用于高度可调的电池
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Application No.: US13692206Application Date: 2012-12-03
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Publication No.: US09082608B2Publication Date: 2015-07-14
- Inventor: Aaron T. Francis
- Applicant: Intermolecular, Inc.
- Applicant Address: US CA San Jose
- Assignee: Intermolecular, Inc.
- Current Assignee: Intermolecular, Inc.
- Current Assignee Address: US CA San Jose
- Main IPC: B01L3/00
- IPC: B01L3/00 ; H01L21/00 ; H01L21/67
Abstract:
In some embodiments of the present disclosure, an apparatus for combinatorial wet processing includes: a chuck, a substrate located on the chuck, a cell located over the substrate; and a height adjustment mechanism for the cell above the substrate wherein applying compressed air on an O-ring in a gland prevents vertical movement of the cell relative to the position of the substrate.
Public/Granted literature
- US20140150245A1 Pneumatic Clamping Mechanism for Cells with Adjustable Height Public/Granted day:2014-06-05
Information query
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