Invention Grant
US09082801B2 Rotatable locating apparatus with dome carrier and operating method thereof
有权
带圆顶托架的可旋转定位装置及其操作方法
- Patent Title: Rotatable locating apparatus with dome carrier and operating method thereof
- Patent Title (中): 带圆顶托架的可旋转定位装置及其操作方法
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Application No.: US13711631Application Date: 2012-12-12
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Publication No.: US09082801B2Publication Date: 2015-07-14
- Inventor: Pei-Shan Wu , Kuan-Chou Chen , Sheng-Lang Lee , Fu-Ching Tung , Chia-Ming Chen
- Applicant: Industrial Technology Research Institute
- Applicant Address: TW Hsinchu
- Assignee: Industrial Technology Research Institute
- Current Assignee: Industrial Technology Research Institute
- Current Assignee Address: TW Hsinchu
- Agency: Jianq Chyun IP Office
- Priority: TW101132323A 20120905
- Main IPC: H01L21/67
- IPC: H01L21/67 ; H01L21/68 ; H01L21/687 ; C23C14/50

Abstract:
A rotatable locating apparatus including a fixing base, a rotatable rack, a first driving module, a carrier, and a second driving module is provided. The rotatable rack is pivoted on the fixing base through a first rotation axis. The first driving module is coupled to the rotatable rack to drive the rotatable rack rotating with respect to the fixing base along the first rotation axis. The carrier is provided with accommodating slots on an arc surface of the carrier, and the carrier is pivoted on the rotatable rack through a second rotation axis. The second rotation axis passes through a curvature center of the arc surface and is perpendicular to the first rotation axis. The curvature center is located on the first rotation axis. The second driving module is coupled to the carrier to drive the carrier rotating with respect to the rotatable rack along the second rotation axis.
Public/Granted literature
- US20140059836A1 ROTATABLE LOCATING APPARATUS WITH DOME CARRIER AND OPERATING METHOD THEREOF Public/Granted day:2014-03-06
Information query
IPC分类: