Invention Grant
US09085145B2 Method of forming electromechanical transducer film, electromechanical transducer film, electromechanical transducer element, and liquid discharge head 有权
形成机电换能器膜,机电换能器膜,机电换能器元件和液体排出头的方法

Method of forming electromechanical transducer film, electromechanical transducer film, electromechanical transducer element, and liquid discharge head
Abstract:
Disclosed is an electromechanical transducer film forming method including a surface modification process; an application process; and processes of drying, thermally decomposing, and crystallizing sol-gel solution applied to a portion of a surface of a first electrode. An electromechanical transducer film is formed on a desired pattern area on the surface of the first electrode by repeating the above processes. In the application process, each of dots of the sol-gel solution applied by the inkjet method drops onto both a first area inside the desired pattern area and a second area outside the desired pattern area. The first area is a hydrophilic area on the surface of the first electrode, and the second area is a hydrophobic area on the surface of the first electrode. The hydrophilic area and the hydrophobic area have been modified by the surface modification process.
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