Invention Grant
- Patent Title: Semiconductor structure and method for manufacturing the same
- Patent Title (中): 半导体结构及其制造方法
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Application No.: US14049253Application Date: 2013-10-09
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Publication No.: US09087825B2Publication Date: 2015-07-21
- Inventor: Hang-Ting Lue , Yi-Hsuan Hsiao
- Applicant: MACRONIX INTERNATIONAL CO., LTD.
- Applicant Address: TW Hsinchu
- Assignee: MACRONIX INTERNATIONAL CO., LTD.
- Current Assignee: MACRONIX INTERNATIONAL CO., LTD.
- Current Assignee Address: TW Hsinchu
- Agency: McClure, Qualey & Rodack, LLP
- Main IPC: H01L23/485
- IPC: H01L23/485 ; H01L27/115 ; H01L29/423 ; H01L29/792 ; H01L23/00

Abstract:
A semiconductor structure and a method for manufacturing the same are provided. The method comprises following steps. A first silicon-containing conductive material is formed on a substrate. A second silicon-containing conductive material is formed on the first silicon-containing conductive material. The first silicon-containing conductive material and the second silicon-containing conductive material have different dopant conditions. The first silicon-containing conductive material and the second silicon-containing conductive material are thermally oxidized for turning the first silicon-containing conductive material wholly into an insulating oxide structure, and the second silicon-containing conductive material into a silicon-containing conductive structure and an insulating oxide layer.
Public/Granted literature
- US20140035140A1 Semiconductor Structure and Method for Manufacturing the Same Public/Granted day:2014-02-06
Information query
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