发明授权
- 专利标题: Linear motor, movable stage and electron microscope
- 专利标题(中): 线性电机,活动台和电子显微镜
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申请号: US13489522申请日: 2012-06-06
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公开(公告)号: US09093890B2公开(公告)日: 2015-07-28
- 发明人: Hideki Tanaka , Masahiro Koyama , Masaki Mizuochi , Hiroshi Tsuji
- 申请人: Hideki Tanaka , Masahiro Koyama , Masaki Mizuochi , Hiroshi Tsuji
- 申请人地址: JP Tokyo
- 专利权人: HITACHI HIGH-TECHNOLOGIES CORPORATION
- 当前专利权人: HITACHI HIGH-TECHNOLOGIES CORPORATION
- 当前专利权人地址: JP Tokyo
- 代理机构: Baker Botts L.L.P.
- 优先权: JP2011-125930 20110606
- 主分类号: H01J37/20
- IPC分类号: H01J37/20 ; H02K41/03 ; H02K41/035 ; H01J37/28 ; H02K1/02 ; H02K1/17
摘要:
It is an object to balance suppression of a leakage magnetic field and driving performance. In a linear motor including a stator including a first yoke having an open face and two rows of permanent magnets linearly arrayed inside the first yoke so that S-poles and N-poles are alternate and a movable element arranged between the two rows of permanent magnets and linearly moving, a second yoke is connected to an open end of the first yoke so as to cover the open end of the first yoke and the permanent magnets when viewed from the open face of the first yoke.
公开/授权文献
- US20120305766A1 LINEAR MOTOR, MOVABLE STAGE AND ELECTRON MICROSCOPE 公开/授权日:2012-12-06
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