发明授权
US09093890B2 Linear motor, movable stage and electron microscope 有权
线性电机,活动台和电子显微镜

Linear motor, movable stage and electron microscope
摘要:
It is an object to balance suppression of a leakage magnetic field and driving performance. In a linear motor including a stator including a first yoke having an open face and two rows of permanent magnets linearly arrayed inside the first yoke so that S-poles and N-poles are alternate and a movable element arranged between the two rows of permanent magnets and linearly moving, a second yoke is connected to an open end of the first yoke so as to cover the open end of the first yoke and the permanent magnets when viewed from the open face of the first yoke.
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