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公开(公告)号：US09093890B2
公开(公告)日：2015-07-28
申请号：US13489522
申请日：2012-06-06
申请人： Hideki Tanaka , Masahiro Koyama , Masaki Mizuochi , Hiroshi Tsuji
发明人： Hideki Tanaka , Masahiro Koyama , Masaki Mizuochi , Hiroshi Tsuji
CPC分类号： H02K41/0356 , H01J37/20 , H01J37/28 , H01J2237/0264 , H01J2237/20228 , H02K1/02 , H02K1/17 , H02K41/031
摘要： It is an object to balance suppression of a leakage magnetic field and driving performance. In a linear motor including a stator including a first yoke having an open face and two rows of permanent magnets linearly arrayed inside the first yoke so that S-poles and N-poles are alternate and a movable element arranged between the two rows of permanent magnets and linearly moving, a second yoke is connected to an open end of the first yoke so as to cover the open end of the first yoke and the permanent magnets when viewed from the open face of the first yoke.
摘要翻译： 目的是平衡泄漏磁场的抑制和驱动性能。 在包括定子的线性电动机中，该定子包括具有开放面的第一磁轭和在第一磁轭内线性排列的两行永磁体，使得S极和N极交替，并且可移动元件布置在两排永磁体之间 并且线性移动时，第二磁轭连接到第一磁轭的开口端，从而当从第一磁轭的开放面观察时，覆盖第一磁轭和永磁体的开口端。
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公开(公告)号：US20120305766A1
公开(公告)日：2012-12-06
申请号：US13489522
申请日：2012-06-06
申请人： Hideki TANAKA , Masahiro Koyama , Masaki Mizuochi , Hiroshi Tsuji
发明人： Hideki TANAKA , Masahiro Koyama , Masaki Mizuochi , Hiroshi Tsuji
CPC分类号： H02K41/0356 , H01J37/20 , H01J37/28 , H01J2237/0264 , H01J2237/20228 , H02K1/02 , H02K1/17 , H02K41/031
摘要： It is an object to balance suppression of a leakage magnetic field and driving performance. In a linear motor including a stator including a first yoke having an open face and two rows of permanent magnets linearly arrayed inside the first yoke so that S-poles and N-poles are alternate and a movable element arranged between the two rows of permanent magnets and linearly moving, a second yoke is connected to an open end of the first yoke so as to cover the open end of the first yoke and the permanent magnets when viewed from the open face of the first yoke.
摘要翻译： 目的是平衡泄漏磁场的抑制和驱动性能。 在包括定子的线性电动机中，该定子包括具有开放面的第一磁轭和在第一磁轭内线性排列的两行永磁体，使得S极和N极交替，并且可移动元件布置在两排永磁体之间 并且线性移动时，第二磁轭连接到第一磁轭的开口端，从而当从第一磁轭的开放面观察时，覆盖第一磁轭和永磁体的开口端。
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公开(公告)号：US20140328101A1
公开(公告)日：2014-11-06
申请号：US14356408
申请日：2012-08-28
摘要： A voltage conversion circuit has a plurality of primary capacitors charged by a power supply, a secondary capacitor connected in parallel to the respective plurality of primary capacitors that is charged at a voltage supplied to a load circuit, a plurality of switching circuits provided in association with the respective plurality of primary capacitors that change over a connection state between the primary capacitors and the secondary capacitor, and a connection control circuit that successively connects the respective primary capacitors to the secondary capacitor through the corresponding switching circuits, the respective primary capacitors across which the charging voltages reach a predetermined connection voltage higher than a charging voltage across the secondary capacitor.
摘要翻译： 电压转换电路具有通过电源充电的多个初级电容器，与被提供给负载电路的电压充电的相应的多个初级电容并联连接的次级电容器，多个开关电路， 在主电容器和次级电容器之间切换连接状态的多个初级电容器以及通过相应的开关电路将各个初级电容器连续地连接到次级电容器的连接控制电路， 充电电压达到高于次级电容器两端的充电电压的预定连接电压。
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公开(公告)号：US08822715B2
公开(公告)日：2014-09-02
申请号：US13703185
申请日：2011-06-21
申请人： Kiyoharu Hirao , Katsuichi Ohtsuki , Hiroshi Tsuji , Hiroki Sato
发明人： Kiyoharu Hirao , Katsuichi Ohtsuki , Hiroshi Tsuji , Hiroki Sato
IPC分类号： C07F9/12 , C09K21/12 , B01J27/138 , B01J27/125 , B01J27/16
CPC分类号： C07F9/12 , B01J27/125 , B01J27/138 , B01J27/16 , C09K21/12
摘要： A method for producing an aromatic diphosphate comprising: Step 1 which is a step where a specific aromatic monohydroxy compound having a steric hindrance group at ortho-positions is made to react with phosphorus oxyhalide in the presence of a Lewis acid catalyst and then the unreacted phosphorus oxyhalide is removed under a reduced pressure to give a specific; and Step 2 which is a step where the reaction product obtained in the above step is made to react with a specific aromatic dihydroxy compound in an amount of 0.5 mol to 1 mol of halogen contained in the reaction product in the presence of a Lewis acid catalyst to give a specific aromatic diphosphate.
摘要翻译： 一种制备芳族二磷酸盐的方法，包括：步骤1，其中在路易斯酸催化剂存在下使位于邻位的具有位阻基团的特定芳族单羟基化合物与磷酰卤反应，然后将未反应的磷 在减压下除去卤氧化物，得到特定的; 和步骤2，其中在路易斯酸催化剂存在下使上述步骤中得到的反应产物与特定的芳族二羟基化合物以0.5mol至1mol的反应产物中所含的卤素反应 得到特定的芳族二磷酸酯。
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公开(公告)号：US20130090490A1
公开(公告)日：2013-04-11
申请号：US13703185
申请日：2011-06-21
申请人： Kiyoharu Hirao , Katsuichi Ohtsuki , Hiroshi Tsuji , Hiroki Sato
发明人： Kiyoharu Hirao , Katsuichi Ohtsuki , Hiroshi Tsuji , Hiroki Sato
CPC分类号： C07F9/12 , B01J27/125 , B01J27/138 , B01J27/16 , C09K21/12
摘要： A method for producing an aromatic diphosphate comprising: Step 1 which is a step where a specific aromatic monohydroxy compound having a steric hindrance group at ortho-positions is made to react with phosphorus oxyhalide in the presence of a Lewis acid catalyst and then the unreacted phosphorus oxyhalide is removed under a reduced pressure to give a specific; and Step 2 which is a step where the reaction product obtained in the above step is made to react with a specific aromatic dihydroxy compound in an amount of 0.5 mol to 1 mol of halogen contained in the reaction product in the presence of a Lewis acid catalyst to give a specific aromatic diphosphate.
摘要翻译： 一种制备芳族二磷酸盐的方法，包括：步骤1，其中在路易斯酸催化剂存在下使位于邻位的具有位阻基团的特定芳族单羟基化合物与磷酰卤反应，然后将未反应的磷 在减压下除去卤氧化物，得到特定的; 和步骤2，其中在路易斯酸催化剂存在下使上述步骤中得到的反应产物与特定的芳族二羟基化合物以0.5mol至1mol的反应产物中所含的卤素反应 得到特定的芳族二磷酸酯。
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公开(公告)号：US20130082194A1
公开(公告)日：2013-04-04
申请号：US13703926
申请日：2011-06-03
CPC分类号： G10K11/16 , G21K5/00 , H01J37/28 , H01J2237/0216
摘要： A charged particle radiation device includes a sample chamber in which a sample stage adapted to mount a sample is installed, a charged particle radiation irradiation section adapted to irradiate the sample with a charged particle radiation to observe and fabricate the sample, sidewalls installed on a periphery of the sample chamber and the charged particle radiation irradiation section, a ceiling board installed on a plane located in an upper part of the sidewalls, and a sound absorbing structure section disposed below the ceiling board, and including a plurality of hole sections and a hollow section communicated with the hole sections. The sound absorbing structure section has an absorption band including a frequency band of a standing wave generated in a space surrounded by the sidewalls and the ceiling board. Further, a soundproof cover may include the sidewalls, ceiling board and sound absorbing structure.
摘要翻译： 带电粒子辐射装置包括：样品室，其中安装有用于安装样品的样品台;带电粒子辐射照射部分，适于用带电粒子辐射照射样品以观察和制造样品，安装在外围的侧壁 所述样品室和所述带电粒子辐射照射部分，安装在位于所述侧壁的上部的平面上的顶板和设置在所述顶板下方的吸声结构部分，并且包括多个孔部分和中空部 部分与孔部分连通。 吸声结构部分具有吸收带，该吸收带包括在由侧壁和天花板板围住的空间中产生的驻波的频带。 此外，隔音罩可以包括侧壁，天花板和吸音结构。
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公开(公告)号：US20120091362A1
公开(公告)日：2012-04-19
申请号：US13378827
申请日：2010-06-03
IPC分类号： H01J37/20
CPC分类号： F16F9/306 , H01J37/16 , H01J2237/0216
摘要： Disclosed is a high resolution and high throughput charged particle radiation device that attenuates the natural vibration of an ion pump in a short time, excited by a reaction force at the time of driving the stage, and prevents occurrence of a loop of force and a loop of current. The charged particle radiation device includes a sample chamber (4) for disposing a sample (3) therein, a charged particle radiation optical lens tube (1) for irradiating the sample (3) with charged particle radiation (10), ion pumps (2a, 2b) for evacuating the charged particle radiation optical lens tube (1), a frame (16) fixedly attached to the sample chamber (4), the frame (16) facing one end of each of the ion pumps (2a, 2b), and vibration absorbers provided between the frame (16) and the one end of each of the ion pumps (2a, 2b), each of the vibration absorbers including a layered structure which includes a viscoelastic sheet (20a, 20b) sandwiched between metal plates (18a, 18b, 21a, 21b).
摘要翻译： 公开了一种高分辨率和高通量的带电粒子辐射装置，其在短时间内衰减离子泵的自然振动，由驱动载物台时的反作用力激发，并且防止发生力和环路的发生 的当前。 带电粒子辐射装置包括用于在其中设置样品（3）的样品室（4），用于用带电粒子辐射（10）照射样品（3）的带电粒子辐射光学透镜管（1），离子泵 ，2b），用于抽空带电粒子辐射光学透镜管（1），固定地附接到样品室（4）的框架（16），面向每个离子泵（2a，2b）的一端的框架（16） 和设置在框架（16）和每个离子泵（2a，2b）的一端之间的减振器，每个振动吸收器包括层压结构，其包括夹在金属板之间的粘弹性片（20a，20b） （18a，18b，21a，21b）。
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公开(公告)号：US08125647B2
公开(公告)日：2012-02-28
申请号：US12372374
申请日：2009-02-17
申请人： Hiroshi Tsuji , Naoma Ban
发明人： Hiroshi Tsuji , Naoma Ban
IPC分类号： G01B9/02
CPC分类号： G01B15/04
摘要： An object of this invention is to provide a charged particle beam apparatus that can easily evaluate the stability of a position that is irradiated with a charged particle beam.To achieve the above object, this invention includes a detector that scans a charged particle beam and detects secondary particles that originate from a substrate, and an image processer that displays an image of the substrate on a display based on the secondary particles that are detected by the detector. The image processer is configured to display on the display any two or more members of the group consisting of a scanning image produced by the charged particle beam of the substrate, a wave in time domain showing fluctuations of the irradiation position of the charged particle beam on the substrate, and a power spectrum of the wave in time domain.
摘要翻译： 本发明的目的是提供一种能够容易地评估被带电粒子束照射的位置的稳定性的带电粒子束装置。 为了实现上述目的，本发明包括扫描带电粒子束并检测源自基底的二次粒子的检测器，以及基于由第二粒子检测的二次粒子在显示器上显示基板的图像的图像处理器， 检测器。 图像处理器被配置为在显示器上显示由基板的带电粒子束产生的扫描图像的组中的任何两个或更多个成员，时域中的波形表示带电粒子束的照射位置的波动 衬底，以及时域中的波的功率谱。
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公开(公告)号：US20070283368A1
公开(公告)日：2007-12-06
申请号：US11421814
申请日：2006-06-02
IPC分类号： G06F9/44
CPC分类号： G06F8/24
摘要： A solution for managing a set of artifacts for a runtime environment is provided, which enables improved tooling that supports runtime extensions to a runtime environment. In one embodiment, an extension handler is obtained for a runtime extension to the runtime environment. The runtime extension comprises a program code that can be included in the runtime environment to extend the default capabilities of a runtime engine/framework. The extension handler provides tooling support for extension artifacts that use/require the runtime extension. When a tooling request for an extension artifact is obtained, the tooling request is processed using the extension handler. In this manner, a tooling solution is shielded from needing to know the specifics of the extension artifact or corresponding runtime extension. Similarly, the developer of the extension handler for the runtime extension is shielded from needing to know any specifics of the tooling environment. As a result, the invention provides a tooling solution that is extensible to support the tooling requirements of an extensible runtime engine.
摘要翻译： 提供了一种用于为运行时环境管理一组工件的解决方案，它可以改进支持运行时环境运行时扩展的工具。 在一个实施例中，获得用于运行时环境的运行时间扩展的扩展处理程序。 运行时扩展包括可以包含在运行时环境中以扩展运行时引擎/框架的默认功能的程序代码。 扩展处理程序为使用/需要运行时扩展的扩展工件提供工具支持。 当获得扩展工件的工具请求时，使用扩展处理程序处理工具请求。 以这种方式，屏蔽了工具解决方案，无需知道扩展工件或相应的运行时扩展的细节。 类似地，运行时扩展的扩展处理程序的开发人员被屏蔽，不需要知道工具环境的任何细节。 因此，本发明提供了可扩展以支持可扩展运行时引擎的工具需求的工具解决方案。
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公开(公告)号：US07276709B2
公开(公告)日：2007-10-02
申请号：US11109861
申请日：2005-04-20
IPC分类号： H01J37/20
CPC分类号： B82Y10/00 , B82Y40/00 , H01J37/3174 , H01J2237/2001 , H01L21/67109
摘要： To achieve high-resolution lithography, the temperature of a sample is controlled with heater wires during electron-beam lithography, the adverse effect of a magnetic field induced by the heater current is suppressed. Namely, heater wires are used to control the temperature of a sample so that the temperature will be maintained constant. In order to minimize the adverse effect of a magnetic field during the passage of currents through the heater wires, two heater wires are layered with the arrangement of the upper and lower sides, currents are fed to flow through the heater wires in mutually opposite directions, and the ratio of the current flowing through the upper heater wire to the one flowing through the lower heater wire is slightly changed from zero.
摘要翻译： 为了实现高分辨率光刻，在电子束光刻期间用加热器线控制样品的温度，抑制由加热器电流引起的磁场的不利影响。 即，使用加热丝来控制样品的温度，使得温度保持恒定。 为了最小化在通过加热线的电流通过期间的磁场的不利影响，两个加热丝线被上下排列地层叠，电流被馈送以相互相反的方向流过加热丝， 并且流过上加热线的电流与流过下加热丝的流的比例从零开始稍微变化。
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