发明授权
US09097982B2 Radiation system, radiation collector, radiation beam conditioning system, spectral purity filter for radiation system and method for forming a spectral purity filter
有权
辐射系统，辐射收集器，辐射束调节系统，辐射系统光谱纯度滤波器和形成光谱纯度滤光片的方法
- 专利标题： Radiation system, radiation collector, radiation beam conditioning system, spectral purity filter for radiation system and method for forming a spectral purity filter
- 专利标题（中）： 辐射系统，辐射收集器，辐射束调节系统，辐射系统光谱纯度滤波器和形成光谱纯度滤光片的方法
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申请号： US12994930申请日： 2009-05-05
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公开(公告)号： US09097982B2公开(公告)日： 2015-08-04
- 发明人: Vadim Yevgenyevich Banine , Wilhelmus Petrus De Boeij , Antonius Johannes Josephus Van Dijsseldonk , Erik Roelof Loopstra , Jan Bernard Plechelmus Van Schoot , Gerardus Hubertus Petrus Maria Swinkels
- 申请人： Vadim Yevgenyevich Banine , Wilhelmus Petrus De Boeij , Antonius Johannes Josephus Van Dijsseldonk , Erik Roelof Loopstra , Jan Bernard Plechelmus Van Schoot , Gerardus Hubertus Petrus Maria Swinkels
- 申请人地址： NL Veldhoven
- 专利权人： ASML NETHERLANDS B.V.
- 当前专利权人： ASML NETHERLANDS B.V.
- 当前专利权人地址： NL Veldhoven
- 代理机构： Pillsbury Winthrop Shaw Pittman LLP
- 国际申请： PCT/EP2009/055380 WO 20090505
- 国际公布： WO2009/144117 WO 20091203
- 主分类号： G03F7/20
- IPC分类号： G03F7/20
摘要：
A radiation system is configured to generate a radiation beam. The radiation system comprising a chamber that includes a radiation source configured to generate radiation, a radiation beam emission aperture, and a radiation collector configured to collect radiation generated by the source, and to transmit the collected radiation to the radiation beam emission aperture. The radiation collector includes a spectral purity filter configured to enhance a spectral purity of the radiation to be emitted via the aperture.
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