Invention Grant
- Patent Title: Substrate treatment apparatus, and substrate treatment method
- Patent Title (中): 基板处理装置和基板处理方法
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Application No.: US12362945Application Date: 2009-01-30
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Publication No.: US09099504B2Publication Date: 2015-08-04
- Inventor: Kazunari Nada , Kenichiro Arai
- Applicant: Kazunari Nada , Kenichiro Arai
- Applicant Address: JP
- Assignee: SCREEN Holdings Co., Ltd.
- Current Assignee: SCREEN Holdings Co., Ltd.
- Current Assignee Address: JP
- Agency: Ostrolenk Faber LLP
- Priority: JP2008-021779 20080131; JP2008-307996 20081202
- Main IPC: C23F1/00
- IPC: C23F1/00 ; C23F1/08 ; H01L21/67 ; B05C5/02 ; B05C11/04 ; B05C11/08

Abstract:
The substrate treatment apparatus according to the present invention includes a substrate holding mechanism which holds a substrate, a nozzle body having a spout which spouts an etching liquid toward a major surface of the substrate held by the substrate holding mechanism, a nozzle body movement mechanism which moves the nozzle body in a predetermined movement direction so as to move an etching liquid application position at which the etching liquid is applied on the major surface, a first flexible sheet attached to the nozzle body to be brought into contact with a portion of the major surface located on one of opposite sides of the etching liquid application position with respect to the movement direction, and a second flexible sheet attached to the nozzle body to be brought into contact with a portion of the major surface located on the other side of the etching liquid application position with respect to the movement direction.
Public/Granted literature
- US20090194509A1 SUBSTRATE TREATMENT APPARATUS, AND SUBSTRATE TREATMENT METHOD Public/Granted day:2009-08-06
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