Invention Grant
US09099559B2 Method to induce strain in finFET channels from an adjacent region
有权
在相邻区域的finFET通道中诱导应变的方法
- Patent Title: Method to induce strain in finFET channels from an adjacent region
- Patent Title (中): 在相邻区域的finFET通道中诱导应变的方法
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Application No.: US14027758Application Date: 2013-09-16
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Publication No.: US09099559B2Publication Date: 2015-08-04
- Inventor: Pierre Morin , Nicolas Loubet
- Applicant: STMicroelectronics, Inc.
- Applicant Address: US TX Coppell
- Assignee: STMICROELECTRONICS, INC.
- Current Assignee: STMICROELECTRONICS, INC.
- Current Assignee Address: US TX Coppell
- Agency: Allen, Dyer, Doppelt, Milbrath & Gilchrist, P.A.
- Main IPC: H01L21/70
- IPC: H01L21/70 ; H01L29/78 ; H01L29/16 ; H01L29/66

Abstract:
Methods and structures for forming strained-channel finFETs are described. Fin structures for finFETs may be formed using two epitaxial layers of different lattice constants that are grown over a bulk substrate. A first thin, strained, epitaxial layer may be cut to form strain-relieved base structures for fins. The base structures may be constrained in a strained-relieved state. Fin structures may be epitaxially grown in a second layer over the base structures. The constrained base structures can cause higher amounts of strain to form in the epitaxially-grown fins than would occur for non-constrained base structures.
Public/Granted literature
- US20150076514A1 METHOD TO INDUCE STRAIN IN FINFET CHANNELS FROM AN ADJACENT REGION Public/Granted day:2015-03-19
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