发明授权
- 专利标题: Controlled fluid delivery in a microelectronic package
- 专利标题(中): 微电子封装中的受控流体输送
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申请号: US11966560申请日: 2007-12-28
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公开(公告)号: US09101931B2公开(公告)日: 2015-08-11
- 发明人: Lakshmi Supriya , James C. Matayabas, Jr. , Nirupama Chakrapani
- 申请人: Lakshmi Supriya , James C. Matayabas, Jr. , Nirupama Chakrapani
- 申请人地址: US CA Santa Clara
- 专利权人: Intel Corporation
- 当前专利权人: Intel Corporation
- 当前专利权人地址: US CA Santa Clara
- 代理机构: Jordan IP Law, LLC
- 主分类号: B01J19/00
- IPC分类号: B01J19/00 ; B01L3/00 ; B29C65/00
摘要:
A microelectronic package includes a die which may include MEMS and CMOS circuitry for analyzing a fluid. A defined path is provided for channeling fluid to the die. Rather than patterning depressions or physical channels in the package substrate, the defined paths comprise coatings that may channel the flow of liquids to the die for biological sensor type applications. The defined paths may comprise a wetting coating that has an affinity to fluids. Similarly, the defined paths may comprise a dewetting coating the tend to repel fluid surrounding the paths.
公开/授权文献
- US20090169427A1 CONTROLLED FLUID DELIVERY IN A MICROELECTRONIC PACKAGE 公开/授权日:2009-07-02
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